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Volumn 82, Issue C, 2015, Pages 314-326

Direction dependent etching of diamond surfaces by hyperthermal atomic oxygen: A ReaxFF based molecular dynamics study

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; CALCULATIONS; DIAMONDS; ETCHING; FILMS; FUNCTIONAL GROUPS; MOLECULAR DYNAMICS; ORBITS; OXYGEN; THIN FILMS;

EID: 84923640490     PISSN: 00086223     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.carbon.2014.10.076     Document Type: Article
Times cited : (28)

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