Square wave driver for piezoceramic actuators

Actuators

Volumn 1, Issue 1, 2012, Pages 12-20

  Jakiela, Slawomir ^a   Zaslona, Jan ^a   Michalski, Jacek A ^a  

^a INSTITUTE OF PHYSICAL CHEMISTRY   (Poland)

Author keywords

Microfluidic valve; Piezoceramic actuator; Piezoceramic capacitance; Square wave driver

Indexed keywords

EID: 84919770355     PISSN: None     EISSN: 20760825     Source Type: Journal    
DOI: 10.3390/act1010012     Document Type: Article

References (21)

1. Mark, D.; Haeberle, S.; Roth, G.; von Stetten, F.; Zengerle, R. Microfluidic lab-on-a-chip platforms: Requirements, characteristics and applications. Chem. Soc. Rev. 2010, 39, 1153-1182
2. The, S.-Y.; Lin, R.; Hung, L.-H.; Lee, A.P. Droplet microfluidics. Lab Chip 2008, 8, 198-220
3. Kelly, R.T. Advances in Microfluidics; InTech: Rijeka, Croatia, 2012; Available online: http://www.intechopen.com/books/advances-in-microfluidics (accessed on 7 March 2012)
4. Baek, J.Y.; Park, J.Y.; Ju, J.I.; Lee, T.S.; Lee, S.H. A pneumatically controllable flexible and polymeric microfluidic valve fabricated via in situ development J. Micromech. Microeng. 2005, 15, 1015-1020
5. Huang, M.C.; Ye, H.; Kuan, Y.K.; Li, M.-H.; Ying, J.Y. Integrated two-step gene synthesis in a microfluidic device. Lab Chip 2009, 9, 276-285
6. Churski, K.; Michalski, J.; Garstecki, P. Droplet on demand system utilizing a computer controlled microvalve integrated into a stiffpolymeric microfluidic device. Lab Chip 2010, 10, 512-518
7. Laser, D.J.; Santiago, J.G. A review of micropumps. J. Micromech. Microeng. 2004, 14, R35-R64
8. Duggirala, R.; Son, I.S.; Lal, A. A Pyroelectric-Piezoelectric Valve for Integrated Microfluidics. In Proceedings of the 12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 03), Boston, MA, USA, 8-12 June 2003; Volume 2, pp. 1554-1557
9. Lee, C.; Yang, E.H.; Saeidi, S.M.; Khodadadi, J.M. Fabrication, characterization, and computational modeling of a piezoelectrically actuated microvalve for liquid flow control. J. Microelectromech. Syst. 2006, 15, 686-696
10. Ham, Y.B.; Seo, W.S.; Oh, S.J.; Park, J.H.; Yun, S.N.; Ahn, K.Y. Development of a piezoelectric pump for a highly-precise constant flow rate. J. Korean Phys. Soc. 2010, 57, 873-876
11. Soerensen, O.; Drese, K.S.; Ehrfeld, W.; Hartmann, H.J. Micromachined Flow Handling Components-Micropumps. In Proceedings of the 2nd Conference on Chemical Microsensors and Applications, Boston, MA, USA, 19-20 September 1999; pp. 52-60
12. Lee, C.J.; Sheen, H.J.; Chu, H.C.; Hsu, C.J.; Hu, T.H. The development of a triple-channel separator for particle removal with self-pumping oscillating flow. J. Micromech. Microeng. 2007, 17, 439-446
13. Xu, J.; Attinger, D. Drop on demand in a microfluidic chip. J. Micromech. Microeng. 2008, 18, 065020
14. Chen, C.H.; Cho, S.H.; Tsai, F.; Erten, A.; Lo, Y.H. Microfluidic cell sorter with integrated piezoelectric actuator. Biomed. Microdev. 2009, 11, 1223-1231
15. Truckenmüller, R.; Ahrens, R.; Cheng, Y.; Fischer, G.; Saile, V. An ultrasonic welding based process for building up a new class of inert fluidic microsensors and-actuators from polymers. Sens. Actuat. A Phys. 2006, 132, 385-392
16. Graf, N.J.; Bowser, M.T. A soft-polymer piezoelectric bimorph cantilever-actuated peristaltic Micro pump. Lab Chip 2008, 8, 1664-1670
17. Ham, Y.-B.; Seo, W.-S.; Oh, S.-J.; Park, J.-H.; Yun, S.-N.; Ahn, K.-Y. Development of a piezoelectric pump for a highly-precise constant flow rate. J. Korean Phys. Soc. 2010, 57, 873-876
18. Kim, Y.S.; Kim, J.H.; Na, K.H.; Rhee, K. Experimental and numerical studies on the performance of a polydimethylsiloxane valveless micro pump. Proc. Inst. Mech. Eng., Part C J. Mech. Eng. Sci. 2005, 219, 1139-1145
19. Kim, J.H.; Kang, C.J.; Kim, Y.-S. A disposable polydimethylsiloxane-based diffuser micropump actuated by piezoelectric-disc. Microelectron. Eng. 2004, 71, 119-124
20. Balogh, L. Design and application guide for high speed MOSFET gate drive circuits. Available online: http://www.ti.com/lit/ml/slup169/slup169.pdf (accessed on 3 April 2012)
21. Anonymous. PowerMOS transistor. Avalanche energy rated-IRF840. Philips Semiconductor Product Specification. Available online: http://www.datasheetcatalog.org/datasheet/philips/IRF840.pdf (accessed on 3 April 2012)