Experimental and numerical studies on the performance of a polydimethylsiloxane valveless micropump

Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science

Volumn 219, Issue 10, 2005, Pages 1139-1145

  Kim, Y S ^a   Kim, J H ^a   Na, K H ^a   Rhee, K ^a  

^a Myong Ji University   (South Korea)

Author keywords

Diaphragm deflection; Diffuser; Micropump; Numerical analysis; Piezoelectric disc; Polydimethylsiloxane(PDMS)

Indexed keywords

ATOMIC FORCE MICROSCOPY; BUBBLES (IN FLUIDS); COMPUTATIONAL FLUID DYNAMICS; DIAPHRAGMS; DIFFUSERS (FLUID); FLOW MEASUREMENT; MATHEMATICAL MODELS; METHANOL; NUMERICAL ANALYSIS; NUMERICAL METHODS;

DIAPHRAGMS DEFLECTION; GLASS DIAPHRAGMS; PIEZOELECTRIC DISC; PIEZOELECTRIC-ACTUATED DIFFUSER MICROPUMP; POLYDIMETHYLSILOXANE (PDMS); VALVELESS MICROPUMP;

PUMPS;

MATHEMATICAL ANALYSIS; PERFORMANCE ASSESSMENT; PUMPING SYSTEM; VALVE;

EID: 28944449891     PISSN: 09544062     EISSN: None     Source Type: Journal    
DOI: 10.1243/095440605X31887     Document Type: Article

References (18)

1. Thielicke, E. and Obermeier, E. Microactuators and their technologies. Mechantronics, 2000, 10, 431-455.
2. Schabmueller, C. G. J., Koch, M., Evans, A. G. R., and Brunnschweiler, A. Design and fabrication of microflidic circuit board. J. Micromech. Microeng., 1999, 11, 263-269.
3. Quake, S. R. and Scherer, A. From micro- to nanofabrication with soft materials. Science, 2000, 290, 1536-1540.
4. Unger, M. A., Chou, H., Thorsen, T., Scherer, A., and Quake, S. R. Monolithic microfabricated valves and pumps by multiplayer soft lithography. Science, 2000, 288, 113-116.
5. Robbins, W. P., Polla, D. L., Tamagawa, T., and Glumac, D. E. Design of linear motion microactuators using piezoelectric thin films. J. Micromech. Microeng., 1991, 1, 247-252.
6. Trimmer, W. S. N., Gabriel, K. J., and Mahadevan, R. Silicon electrostatic motors. In Transactions of the 4th International Conference on Solid State Sensors and Actuators, Tokyo, Japan, 1987, pp. 857-860.
7. Wagner, B., Kreutzer, M., and Benecke, W. Linear and rotational micromotors fabricated using silicon technology. In Proceedings of the IEEE Micro Electric Mechanical Systems, Travemünde, Germany, 1992, pp. 183-189.
8. Reynaerts, D., Peir, J., and Van Brussel, H. An implantable drug delivery system based on shape memory alloy microactuation. Sensors Actuators, 1997, A61, 455-462.
9. Van de Pol, F. C. M., van Lintel, H. T. G., Elwenspeck, M., and Fluitman, J. H. J. A thermopneumatic micropump based on microengineering techniques. Sensors Actuators, 1990, 21, 198-202.
10. Manz, A., Effenhauser, C. S., and Burggraf, N. Electroosmotic pumping and electrophoretic separations for miniaturized chemical analysis systems. J. Micromech. Microeng., 1994, 4, 257-265.
11. Olson, A., Stemme, G., and Stemme, E. Diffusion element design investigation for valveless pumps. Sensors Actuators, 1996, A57, 137-143.
12. Jiang, X. N., Zhou, Z. Y., Huang, M Y., Li, Y., Yang, Y., and Liu, C. Y. Micronozzle/diffuser flow and its application in micro valveless pumps. Sensors Actuators, 1998, A70, 81-87.
13. Ulrich, J. and Zengerle, R. Static and dynamic flow simulation of a KOH-etched microvalve using the finite element method. Sensors Actuators, 1996, A53, 379-385.
14. Olson, A., Stemme, G., and Stemme, E. Numerical and experimental studies of flat-walled diffuser elements for valveless micropumps. Sensors Actuators, 2000, A84, 165-175.
15. Hock, T. H. and Li, H. Designing a fluid pump for microfluidic cooling systems in electronic components. In Transactions of the IEEE/CPMT Electronic Packaging Technology Conference, Hawaii, USA, 1997, pp. 115-118.
16. Chee, C. Y. K., Tong, L., and Steven, G. P. A review on the modeling of piezoelectric sensors and actuators incorporated in intelligent structures. J. Intell. Mater. Syst. Struct., 1998, 9, 3-19.
17. Ren, X., Bachman, M., Sims, C., Li, G. P., and Allbritton, N. Electroosmotic properties of microfluidic channels composed of polydimethylsiloxane. J. Chromatogr., 2001, B762, 117-125.
18. Pan, L. S., Ng, T. Y., Liu, G. R., Lam, K. Y., and Jiang, T. Y. Analytical solutions for the dynamic analysis of a valveless micropump- a fluid-membrane coupling study. Sensors Actuators, 2001, A93, 173-181.