Calibration of V-shaped cantilever for micro force metrology in biomedical engineering

Proceedings of the 6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006

Volumn 1, Issue , 2006, Pages 192-195

  Doering, L ^a   Brand, U ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BIOMEDICAL ENGINEERING; CALIBRATION; NANOCANTILEVERS; QUALITY ASSURANCE; SEMICONDUCTOR DEVICE MANUFACTURE;

MEASURING INSTRUMENTS; MICRO-CANTILEVERS; MOLECULAR FORCES; SCANNING FORCE MICROSCOPES; SEMICONDUCTOR INDUSTRY; STATE OF THE ART; STYLUS INSTRUMENT; V-SHAPED CANTILEVERS;

PRECISION ENGINEERING;

EID: 84908262186     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. Stark, Robert W., Drobek, Tanja, Heckl, Wolfgang M.: Thermomechanical noise of a free v-shaped cantilever for atomic-force microscopy, Ultramicroscopy 86 (2001) 207-215
2. Holbery, J. D., Eden, V. L., Sarikaya, M., Fisher, R. M.: Experimental determination of scanning probe microscope cantilever spring constants utilizing a nanoindentation apparatus, Rev. Sci. Instrum. 71 (2000) 3769-3776
3. Cumpson, Peter J., Hedley, John: Accurate analytical measurements in the atomic force microscope: a microfabricated spring constant standard potentially traceable to the SI, Nanotechnology 14 (2003) 1279-1288
4. Levy, R., Maaloum, M.: Measuring the spring constant of atomic force microscope cantilevers: thermal fluctuations and other methods, Nanotechnology 13 (2002) 33-37
5. Doering, L., Peiner, E., Behrens, I., Brand, U.: Calibration of micro force setting standards using a new nano force calibration device, In Proc. of: Micro system technologies MST, ISBN 3-7723-7020-9, Forum Hotel Mnchen, (2003) 492-494
6. Microcantilever, Datasheet Of: Microlevers for general purpose, ThermoMicroscopes 1171 Borregas Avenue, Sunnyvale, CA 94089