Humidity sensing properties of morphology-controlled ordered silicon nanopillar

Applied Surface Science

Volumn 317, Issue , 2014, Pages 970-973

  Li, Wei ^a,b,c   Hu, Mingyue ^a   Ge, Pengpeng ^a   Wang, Jing ^a   Guo, Yanyan ^a  

^a NANJING UNIVERSITY OF POSTS AND TELECOMMUNICATIONS   (China)

^b Key Laboratory of Radio Frequency and Micro Nano Electronics of Jiangsu Province   (China)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Humidity sensing; Morphology controlled; Ordered silicon nanoillar

Indexed keywords

HUMIDITY SENSORS; NANOSTRUCTURES; SILICON;

HUMIDITY SENSING; HUMIDITY SENSING PROPERTY; MORPHOLOGY-CONTROLLED; NANO SPHERE LITHOGRAPHY; ORDERED SILICON NANOILLAR; RESPONSE AND RECOVERY TIME; SENSING CHARACTERISTICS; SILICON NANOPILLARS;

HUMIDITY CONTROL;

EID: 84908215660     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2014.08.136     Document Type: Article

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