Selectively grown vertical Si p-MOS transistor with reduced overlap capacitances

European Solid-State Device Research Conference

Volumn , Issue , 1998, Pages 568-571

  Klaes, D ^a   Moers, J ^a   Tonnemann A ^a   Grimm, M ^a   Wickenhauser, S ^a   Vescan, L ^a   Marso, M ^a   Kordos P ^a   Luth H ^a   Grabolla, T ^b  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

^b IHP   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; EPITAXIAL GROWTH; FIELD EFFECT TRANSISTORS; PHOTOLITHOGRAPHY; SILICON;

BLANKET EPITAXY; CHANNEL LENGTH; CHANNEL REGION; HIGH INTEGRATION DENSITY; HIGH-SPEED APPLICATIONS; LATERAL DIMENSION; OVERLAP CAPACITANCE; SHORT CHANNELS;

SEMICONDUCTING SILICON;

EID: 84907905901     PISSN: 19308876     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. D. Behammer, J. Vescan, R. Loo, J. Moers, A. Mück, H. Lfith, T. Grabolla: "Selectively grown vertical Si-p MOS transistor with short channel lengths", Electronics Letters, I996, 32, pp. 406407
2. L. Risch., Th. Aeugle and W. ROsner, "Recent Progress With Vertical Transistors", Proceedings of ESSDERC 97, Stuttgart, pp. 34-41
3. H. Gossner, I. Eisele, L. Risch: "Vertical Si-Meta1- Oxide-Semiconductor Field Effect Transistor with Channel Lengths of 50 run by Molecular Beam Epitaxy", Japanese Journal of Applied Physics, 1994, 33( 4)B, pp. 2423-2428
4. L. Vescan: "Radiative Recombination in SiGeiSi Dots and wires selectively grown by LPCVD" in "Low Dimensional Structures prepared by Epitaxial Growth or Regrowth on Patterned Substrates", K. Eberl et al, 1995, Kluwer Academic Publisher, pp. 173-184
5. L. Vescan, C. Dieker, A. Hartmann and A. van der Hart, Sernicond. Sci. Techno!., 9 ( 1994) 387
6. R. Loo, J. Vescan, D. Behammer, J. Moers, T. Grabolla, w. Langen, D. Klaes, U. Zastrow, P. K6rdos, H. Lüth: "Vertical Si-p MOS Transistor selectively grown by low pressure chemical vapour deposition", Thin Solid Films 294 (1997) 267-270
7. ATLAS Device Simulation Software, Silvaco International, Version 4. 0, June, 1995