Mobility degradation in high-k transistors: The role of the charge scattering

European Solid-State Device Research Conference

Volumn , Issue , 2003, Pages 399-402

  Lujan, G S ^a,b   Kubicek, S ^a   De Gendt, S ^a   Heyns, M ^a   Magnus, W ^a   De Meyer, K ^a,b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

MOBILITY DEGRADATION;

EID: 84907691035     PISSN: 19308876     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ESSDERC.2003.1256898     Document Type: Conference Paper

References (9)

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