Directed self-assembly of topcoat-free, Integration-friendly high-χ block copolymers

Journal of Photopolymer Science and Technology

Volumn 27, Issue 4, 2014, Pages 419-424

  Vora, Ankit ^a   Chunder, Anindarupa ^a   Tjio, Melia ^a   Balakrishman, Srinivasan ^a   Lofano, Elizabeth ^a   Cheng, Joy ^a   Sanders, Daniel P ^a   Hirahara, Eri ^b   Akiyama, Yasushi ^b   Polishchuk, Orest ^c   Paunescu, Margareta ^c   Baskaran, Durairaj ^c   Hong, Sung Eun ^c   Lin, Guanyang ^c  

^a IBM ALMADEN RESEARCH CENTER   (United States)

^b AZ Electronic Materials (Japan) KK   (Japan)

^c AZ Electronic Materials USA Corp   (United States)

Author keywords

Directed self assembly; Organic high block copolymers; Perpendicular lamellae and cylinders; Topcoat free

Indexed keywords

EID: 84907569889     PISSN: 09149244     EISSN: 13496336     Source Type: Journal    
DOI: 10.2494/photopolymer.27.419     Document Type: Article

References (14)

1. M. P. Stoykovich and P. F. Nealey, Mater.Today, 9 (2006) 20.
2. C. T. Black, R. Ruiz, G. Breyta, J. Y. Cheng, M. E. Colburn, K. W. Guarini, H.-C. Kim and Y. Zhang, IBM J. Res. Dev., 51 (2007) 605.
3. Z. Q. Lin, D. H. Kim, X. D. Wu, L. Boosahda, D. Stone, L. LaRose, T. P. Russell, Adv. Mat., 14 (2002) 1373.
4. J. G. Son, K. W. Gotrik, C. A. Ross, ACS Macro Lett., 1 (2012) 1279.
5. S. A. B. Shamsudin, G. Sakaguchi, M. Takenaka, H. Hasegawa, Macromol. Symp., 327 (2013) 72.
6. J. D. Cushen, C. M. Bates, E. L. Rausch, L. M. Dean, S. X. Zhou, C. G. Willson, C. J. Ellison, Macromolecules, 45 (2012) 8722.
7. J. K. Bosworth, M. Y. Paik, R. Ruiz, E. L. Schwartz, J. Q. Huang, A. W. Ko, D. M. Smilgies, C. T. Black, C. K. Ober, ACS. Nano, 2 (2008) 1396.
8. S. Ji, C. C. Liu, J. G. Son, K. Gotrik, G. S. W. Craig, P. Gopalan, F. J. Himpsel, K. Char, P. F. Nealey, Macromolecules, 41 (2008) 9098.
9. C. M. Bates, T. Seshimo, M. J. Maher, W. J. Durand, J. D. Cushen, L. M. Dean, G. Blachut, C. J. Ellison, C. G. Willson, Science, 338 (2012) 775.
10. I. Keen, A. Yu, H. H. Cheng, K. S. Jack, T. M. Nicholson, A. K. Whittaker, I. Blakey, Lamgmuir, 28 (2012) 15876.
11. S. Kim, P. F. Nealey, F. S. Bates, ACS. Macro. Lett., 1 (2012) 11.
12. H. Li, W. Gu, L. Li, Y. Zhang, T. P. Russell, E. B. Coughlin, Macromolecules, 46 (2013) 3737.
13. J. Cheng, R. A. Lawson, W. M. Yeh, N. D. Jarnagin, L. M. Tolbert, C. L. Henderson, Proc. SPIE, 8680 (2013) 86801W.
14. J. Y. Cheng, D. P. Sanders, H. D. Truong, S. Harrer, A. Friz, S. Holmes, M. Colburn, W. D. Hinsberg, ACS Nano, 4 (2010) 4815.