Application of metal film protection to microfluidic chip fabrication using CO2laser ablation

Microsystem Technologies

Volumn 20, Issue 10-11, 2014, Pages 1987-1992

  Chung, C K ^a   Tu, K Z ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ABLATION; FABRICATION; FLUIDIC DEVICES; METALLIC FILMS; METALS; MICROCHANNELS;

CHANNEL WIDTHS; CO2-LASER; GREEN PIGMENTS; METALLIC MASKS; MICRO-FLUIDIC DEVICES; MICROFLUIDIC CHIP; MICROMIXERS; T-SHAPED MICROCHANNELS;

MICROFLUIDICS;

EID: 84907242336     PISSN: 09467076     EISSN: 14321858     Source Type: Journal    
DOI: 10.1007/s00542-013-2041-3     Document Type: Article

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