Microstructure fabrication with a CO2 laser system: Characterization and fabrication of cavities produced by raster scanning of the laser beam

Lab on a Chip

Volumn 3, Issue 4, 2003, Pages 302-307

  Jensen, Martin F ^a,b   Noerholm, Mikkel ^b,c   Christensen, Leif Højslet ^a   Geschke, Oliver ^b  

^a DANISH TECHNOLOGICAL INSTITUTE   (Denmark)

^b TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^c Exiqon AS   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

POLY(METHYL METHACRYLATE);

ARTICLE; ARTIFACT; CARBON DIOXIDE LASER; LASER; LASER SURGERY; MATHEMATICAL ANALYSIS; PARAMETER; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY; TOPOGRAPHY;

EID: 15244349874     PISSN: 14730197     EISSN: 14730189     Source Type: Journal    
DOI: 10.1039/b308153b     Document Type: Article

References (18)

1. H. Becker and L. E. Locascio, Tatama, 2002, 56, 267-287.
2. H. Becker and C. Gärtner, Electrophoresis, 2000, 21, 12-26.
3. H. Klank, J. P. Kutter and O. Geschke, Lab Chip, 2002, 2, 242-247.
4. D. Snakenborg, H. Klank and J. P. Kutter, J. Micromech. Microeng., 2002, 13, in press.
5. Fenix Operator's Manual, v.2.0, Synrad®, 2002.
6. V. S. Mangipudi and M. Tirell, Rubber Chem. Technol., 1998, 71, 407-448.
7. G. Spierings, J. Haisma and F. v. d. Kruis, Philips J. Res., 1995, 49, 139-149.
8. R. Srinivasan, J. Appl. Phys., 1993, 73, 2743-2750.
9. R. Srinivasan, in Laser Ablation, ed. J. C. Miller, Springer Verlag 1994.
10. J. Cohen-Sabban, P.-J. Crepin and J. Gaillard-Groleas, Quasi Confocal Extended Field Surface Sensing, 46th SPIE Annual Meeting, 2001.
11. K. J. Stout, P. J. Sullivan, W. P. Dong, E. Mainsah and N. Luo, Report no. EUR 15178 EN of the European Comission, 1994.
12. SPIP™, Image Metrology A/S, http://imagemet.com.
13. L. G. Pittaway, Brit. J. Appl. Phys, 1964, 987-982.
14. P. G. Berrie and F. N. Birkett, Opt. Lasers Eng., 1980, 1, 107-129.
15. Datasheet for Riacryl XT 1030 BL/BL, Rias A/S, Roskilde, Denmark (2003).
16. A. D. Stroock, S. K. W. Dertinger, A. Ajdari, I. Mezic, H. A. Stone and G. M. Whitesides, Science, 2002, 295, 647-651.
17. A. D. Stroock, S. K. Dertinger, G. M. Whitesides and A. Ajdari, Anal. Chem., 2002, 74, 5306-5312.
18. S. Brinkmann, H. Bodschwinna and H.-W. Lemke, Accessing roughness in three-dimensions using Gaussian regression filtering, 6th International Conference on Metrology and Properties of Engineering Surface, Huddersfield 2000.