Improving surface smoothness of laser-fabricated microchannels for microfluidic application

Journal of Micromechanics and Microengineering

Volumn 21, Issue 9, 2011, Pages

  Wang, Z K ^a   Zheng, H Y ^a   Lim, R Y H ^b   Wang, Z F ^a   Lam, Y C ^b  

^a SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHANT SOLUTION; ETCHING PARAMETERS; ETCHING SOLUTIONS; ETCHING TIME; LASER DIRECT WRITING; LASER PROTOTYPING; LASER RAPID PROTOTYPING; MICRO FLUIDIC APPLICATIONS; MICROCHANNEL SURFACES; MICROFLUIDIC CHIP; POLYMER MICROFLUIDICS; SURFACE SMOOTHNESS; TIME CYCLES; ULTRASONIC BATH; WET-CHEMICAL ETCHING;

ABLATION; ACETONE; CARBON DIOXIDE; ETHANOL; MICROCHANNELS; MICROFLUIDICS; RAPID PROTOTYPING; SURFACE PROPERTIES; ULTRASONIC APPLICATIONS; WET ETCHING;

SURFACE ROUGHNESS;

EID: 80052248625     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/9/095008     Document Type: Article

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