Novel approach to the preparation of organic energetic film for microelectromechanical systems and microactuator applications

ACS Applied Materials and Interfaces

Volumn 6, Issue 14, 2014, Pages 10992-10996

  Wang, Jun ^a   Zhang, Wenchao ^a   Wang, Lianwei ^b   Shen, Ruiqi ^a   Xu, Xing ^a,c   Ye, Jiahai ^a   Chao, Yimin ^d  

^a NANJING UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^b EAST CHINA NORMAL UNIVERSITY   (China)

^c Aerospace Haiying (Zhenjiang) Special Materials Co Ltd   (China)

^d UNIVERSITY OF EAST ANGLIA   (United Kingdom)

Author keywords

energetic materials; MEMS; microactuator; nanoscale RDX; silicon microchannel plate

Indexed keywords

ELECTROMECHANICAL DEVICES; EXPLOSIVES; FILM PREPARATION; MEMS; MICROACTUATORS; PROPYLENE; SOL-GEL PROCESS; XEROGELS;

CYCLOTRIMETHYLENE TRINITRAMINE; DECOMPOSITION TEMPERATURE; FULLY COMPATIBLE; MEMS TECHNOLOGY; NANO SCALE; SILICON MICROCHANNELS; SILICON SUBSTRATES; SOLID MATTER;

IMAGE STORAGE TUBES;

EID: 84904977808     PISSN: 19448244     EISSN: 19448252     Source Type: Journal    
DOI: 10.1021/am5028617     Document Type: Article

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