Influence of geometry, edges and roughness on liquid penetration and removal during wet cleaning

ECS Journal of Solid State Science and Technology

Volumn 3, Issue 6, 2014, Pages

  Extrand, C W ^a   Moon, S I ^a  

^a ENTEGRIS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84904718984     PISSN: 21628769     EISSN: 21628777     Source Type: Journal    
DOI: 10.1149/2.008406jss     Document Type: Article

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