Indium doped zinc oxide thin films deposited by ultrasonic chemical spray technique, starting from zinc acetylacetonate and indium chloride

Materials

Volumn 7, Issue 7, 2014, Pages 5038-5046

  Biswal, Rajesh ^a   Maldonado, Arturo ^a   Vega Pérez, Jaime ^b   Acosta, Dwight Roberto ^c   Olvera, María De La Luz ^a  

^a DEPARTAMENTO DE FÍSICA   (Mexico)

^b INSTITUTO POLITÉCNICO NACIONAL   (Mexico)

^c UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO   (Mexico)

Author keywords

Electrical conductivity; Optical properties; Thin films

Indexed keywords

CHLORINE COMPOUNDS; ELECTRIC CONDUCTIVITY; OPTICAL PROPERTIES; ORGANOMETALLICS; SEMICONDUCTOR DOPING; THIN FILMS; ULTRASONIC APPLICATIONS; ZINC; ZINC CHLORIDE; ZINC OXIDE; ZINC SULFIDE;

CHEMICAL SPRAY TECHNIQUES; DOPED ZINC OXIDE THIN FILMS; ELECTRICAL CHARACTERISTIC; ELECTRICAL CONDUCTIVITY; ELECTRICAL RESISTANCES; PHYSICAL CHARACTERISTICS; SUBSTRATE TEMPERATURE; TRANSPARENT CONDUCTIVE ELECTRODES;

INDIUM;

EID: 84904045011     PISSN: None     EISSN: 19961944     Source Type: Journal    
DOI: 10.3390/ma7075038     Document Type: Article

References (19)

1. Janotti, A.; van de Walle, C.G. Fundamentals of zinc oxide as a semiconductor. Rep. Prog. Phys. 2009, 72, doi:10.1088/0034-4885/72/12/126501.
2. Yun, S.; Lee, J.; Chung, J.; Lim, S. Improvement of ZnO nanorod-based dye-sensitized solar cell efficiency by Al-doping. J. Phys. Chem. Solids 2010, 71, 1724-1731.
3. Chopra, K.L.; Major, S.; Pandya, D.K. Transparent conductors-A status review. Thin Solid Films 1983, 102, 1-46.
4. 2/Vs. Adv. Mater. 2010, 22, 4764-4769.
5. Stadler, A. Transparent conducting oxides-An up-to-date overview. Materials 2012, 5, 661-683.
6. Ratheesh Kumar, P.M.; Sudha Kartha, C.; Vijayakumar, K.P.; Abe, T.; Kashiwaba, Y.; Singh, F.; Avasthi, D.K. On the properties of indium doped ZnO thin films. Semicond. Sci. Technol. 2005, 20, 120-126.
7. Ellmer, K. Resistivity of polycrystalline zinc oxide films: Current status and physical limit. J. Phys. D Appl. Phys. 2001, 34, 3097-3108.
8. Patil, P.S. Versatility of chemical spray pyrolysis technique. Mater. Chem. Phys. 1999, 59, 185-198.
9. Jiao, B.C.; Zhang, X.D.; Wei, C.C.; Sun, J.; Huang, Q.; Zhao, Y. Effect of acetic acid on ZnO:In transparent conductive oxide prepared by ultrasonic spray pyrolysis. Thin Solid Films 2011, 520, 1323-1329.
10. Blandenet, G.; Court, M.; Lagarde, Y. Thin layers deposited by the pyrosol process. Thin Solid Films 1981, 77, 81-90.
11. Nolan, M.G.; Hamilton, J.A.; O'Brien, S.; Bruno, G.; Pereira, L.; Fortunato, E.; Martins, R.; Povey, I.M.; Pemble, M.E. The characterisation of aerosol assisted CVD conducting, photocatalytic indium doped zinc oxide films. J. Photochem. Photobiol. A 2011, 219, 10-15.
12. Romero, R.; Leinen, D.; Dalchiele, E.A.; Ramos-Barrado, J.R.; Martín, F. The effects of zinc acetate and zinc chloride precursors on the preferred crystalline orientation of ZnO and Al-doped ZnO thin films obtained by spray pyrolysis. Thin Solid Films 2006, 515, 1942-1949.
13. Smith, A.; Rodriguez-Clemente, R. Morphological differences in ZnO films deposited by the pyrosol technique: Effect of HCl. Thin Solid Films 1999, 345, 192-196.
14. Biswal, R.R.; Maldonado, A.; de la Luz Olvera, M. Electrical and optical properties of in-doped ZnO thin films via ultrasonic spray pyrolysis. In Proceedings of the 10th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE), Mexico City, Mexico, 30 September-4 October 2013.
15. Ilican, S.; Caglar, Y.; Caglar, M.; Demirci, B. Polycrystalline indium-doped ZnO thin films: Preparation and characterization. J. Optoelectron. Adv. Mater. 2008, 10, 2592-2598.
16. Xua, J.; Wang, H.; Yang, L.; Jiang, M.; Wei, S.; Zhang, T. Low temperature growth of highly crystallized ZnO:Al films by ultrasonic spray pyrolysis from acetylacetone salt. Mater. Sci. Eng. B 2010, 167, 182-186.
17. Cullity, B.D.; Stock, S.R. Elements of X-ray Diffraction, 3rd ed.; Prentice Hall: Upper Saddle River, NJ, USA, 2001.
18. Lin, S.S.; Huang, J.L.; Li, D.F. The effects of R.F. power and substrate temperature on the properties of ZnO thin films. Surf. Coat. Technol. 2004, 176, 173-181.
19. Burstein, E. Anomalous optical absorption limit in InSb. Phys. Rev. 1954, 93, 632-633.