Reliable batch manufacturing of miniaturized vertical vias in soft polymer replica molding

Proceedings of the 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, uTAS 2007

Volumn , Issue , 2007, Pages 527-529

  Carlborg, Carl Fredrik ^a   Haraldsson, Tommy ^a   Stemme, Göran ^a   van der Wijngaart, Wouter ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

Microfluidics; PDMS; Polymer replica molding; Uv curing; Vertical vias

Indexed keywords

PHOTOPOLYMERIZATION; POLYDIMETHYLSILOXANE; SILICONES;

BATCH MANUFACTURING; CATIONIC PHOTOPOLYMERIZATION; MASK LESS; MICROFLUIDIC INTERCONNECTS; POLYDIMETHYLSILOXANE PDMS; POLYMER LAYERS; SOFT POLYMERS;

MANUFACTURE;

EID: 84903872808     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

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2. J. R. Anderson, D. T. Chiu, R. J. Jackman, O. Cherniavskaya, J. C. McDonald, H. K. Wu, S. H. Whitesides and G. M. Whitesides, Anal. Chem., (2000), 72, 3158.
3. U. Kloter, H. Schmid, H.Wolf, B. Michel, D. Juncker, 17th IEEE International Conference on. MEMS, 2004, 745- 748