Development of silicon electrode enhanced by carbon nanotube and gold nanoparticle composites on silicon neural probe fabricated with complementary metal-oxide-semiconductor process

Applied Physics Letters

Volumn 104, Issue 19, 2014, Pages

  Zhang, Songsong ^a,b   Tsang, Wei Mong ^b   Srinivas, Merugu ^b   Sun, Tao ^b   Singh, Navab ^b   Kwong, Dim Lee ^b   Lee, Chengkuo ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE COATINGS; CYCLIC VOLTAMMETRY; DIELECTRIC DEVICES; ELECTROCHEMICAL ELECTRODES; ELECTROCHEMICAL IMPEDANCE SPECTROSCOPY; GOLD; NANOPARTICLES; PHOSPHORUS; PROBES; SILICON; SURFACE ROUGHNESS;

CATHODAL CHARGE STORAGE CAPACITIES; CHARGE STORAGE CAPACITY; COMPLEMENTARY METAL OXIDE SEMICONDUCTORS; DOUBLE-LAYER CAPACITANCE; ELECTROPLATING PROCESS; INTERFACIAL IMPEDANCE; SILICON NEURAL PROBES; SINGLE CRYSTAL SILICON;

SILICON WAFERS;

EID: 84900851989     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4875961     Document Type: Article

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