Investigation of a new high sensitive micro-electromechanical strain gauge sensor based on graphene piezoresistivity

Key Engineering Materials

Volumn 605, Issue , 2014, Pages 207-210

  Gamil, Mohammed ^a   Tabata, Osamu ^b   Nakamura, Koichi ^b   El Bab, Ahmed M R Fath ^a   El Moneim, Ahmed Abd ^a  

^a Egypt Japan University of Science and Technology   (Egypt)

^b KYOTO UNIVERSITY   (Japan)

Author keywords

Gauge factor; Graphene; MEMS devices; Piezoresistive sensors; Strain gauge

Indexed keywords

CHEMICAL VAPOR DEPOSITION; GRAPHENE; GRAPHENE DEVICES; MONOLAYERS; POLYMETHYL METHACRYLATES; TRANSDUCERS;

ELECTROMECHANICAL STRAIN; GAUGE FACTORS; HIGH PRODUCTIVITY; HOMOGENEOUS DISTRIBUTION; MEMSDEVICES; PIEZO-RESISTIVE SENSORS; PIEZORESISTIVE MATERIALS; STRAIN GAUGE SENSORS;

STRAIN GAGES;

EID: 84900432664     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/KEM.605.207     Document Type: Conference Paper

References (8)

1. A. A. Barlian, W.-T. Park, J. R. Mallon, A. J. Rastegar, B.L. Pruitt, Review: Semiconductor piezoresistance for microsystems, Proc. IEEE, 97 (2009) 513-552.
2. X. Chen, X. Zheng, J.-K. Kim, X. Li, D.-W. Lee, Investigation of graphene piezoresistors for use as strain gauge sensors, J. Vac. Sci. Tech. B, 29 (2011) 06FE01-06FE01-05.
3. D.A. Areshkin, D. Gunlycke, C.T. White, Ballistic Transport in Graphene Nanostrips in the Presence of Disorder: Importance of Edge Effects, Nano Lett., 7 (2007) 204-210.
4. X. Li, W. Cai, J. An, S. Kim, J. Nah, D. Yang, R. Piner, A. Velamakanni, I. Jung, E. Tutuc, Large-Area Synthesis of High-Quality and Uniform Graphene Films on Copper Foils, Science. 324 (2009) 1312-1314.
5. Y. Lee, S. Bae, H. Jang, S. Jang, S.-E. Zhu, S.H. Sim, Y.I. Song, B.H. Hong, J.-H. Ahn, Wafer-Scale Synthesis and Transfer of Graphene Films, Nano Lett., 10 (2010) 490-493.
6. X. Li, Y. Zhu, W. Cai, M. Borysiak, B. Han, D. Chen, R.D. Piner, L. Colombo, R.S. Ruoff, Transfer of Large-Area Graphene Films for High-Performance Transparent Conductive Electrodes, Nano Lett. 9 (2009) 4359-4363.
7. Z. Ni, Y. Wang, T. Yu, Z. Shen, Raman spectroscopy and imaging of graphene, Nano Res. 1 (2008) 273-291.
8. A. Ismach, C. Druzgalski, S. Penwell, A. Schwartzberg, M. Zheng, A. Javey, J. Bokor, Y. Zhang, Direct Chemical Vapor Deposition of Graphene on Dielectric Surfaces, Nano Lett. 10 (2010) 1542-1548.