GaN-based micro-LED arrays on flexible substrates for optical cochlear implants

Journal of Physics D: Applied Physics

Volumn 47, Issue 20, 2014, Pages

  Goßler, Christian ^a   Bierbrauer, Colin ^a   Moser, Rüdiger ^a   Kunzer, Michael ^a   Holc, Katarzyna ^a   Pletschen, Wilfried ^a   Köhler, Klaus ^a   Wagner, Joachim ^a   Schwaerzle, Michael ^b   Ruther, Patrick ^b   Paul, Oliver ^b   Neef, Jakob ^c   Keppeler, Daniel ^c   Hoch, Gerhard ^c   Moser, Tobias ^c   Schwarz, Ulrich T ^a,b  

^a FRAUNHOFER INSTITUTE FOR APPLIED SOLID STATE PHYSICS IAF   (Germany)

^b UNIVERSITY OF FREIBURG   (Germany)

^c UNIVERSITY OF GÖTTINGEN   (Germany)

Author keywords

cochlear implant; flexible substrate; micro LED array; optogenetics

Indexed keywords

COCHLEAR IMPLANTS; GALLIUM ALLOYS; GALLIUM NITRIDE; MAMMALS; POLYIMIDES; PROBES; SAPPHIRE; SILICON WAFERS; SUBSTRATES; WAFER BONDING;

ELECTRICAL STIMULATIONS; FLEXIBLE POLYIMIDE SUBSTRATE; FLEXIBLE PRINTED CIRCUIT BOARDS; FLEXIBLE SUBSTRATE; LAYER TRANSFER PROCESS; MICRO-LED ARRAYS; OPTOGENETICS; SPIRAL GANGLION NEURONS;

LIGHT EMITTING DIODES;

EID: 84899994344     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/47/20/205401     Document Type: Article

References (15)

1. Zeng F-G, Rebscher S, Harrison W, Sun X and Feng H 2008 Cochlear implants: system design, integration, and evaluation IEEE Rev. Biomed. Eng. 1 115-42
2. Fishman K E, Shannon R V and Slattery W H 1997 Speech recognition as a function of the number of electrodes used in the SPEAK cochlear implant speech processor J. Speech Lang. Hear. Res. 40 1201-15 (Pubitemid 27422400)
3. Shapiro M G, Homma K, Villarreal S, Richter C-P and Bezanilla F 2012 Infrared light excites cells by changing their electrical capacitance Nature Commun. 3 736
4. Boyden E S, Zhang F, Bamberg E, Nagel G and Deisseroth K 2005 Millisecond-timescale, genetically targeted optical control of neural activity Nature Neurosci. 8 1263-8 (Pubitemid 43348147)
5. Hernandez V H et al 2014 Optogenetic stimulation of the auditory pathway J. Clin. Invest. 124 1114-29
6. Santi P A, Rapson I and Voie A H 2008 Development of the mouse cochlea database (MCD) Hear. Res. 243 11-7
7. Laubsch A, Sabathil M, Baur J, Peter M and Hahn B 2010 High-power and high-efficiency InGaN-based light emitters IEEE Trans. Electron Dev. 57 79-87
8. Kelly M K, Ambacher O, Dimitrov R, Handschuh R and Stutzmann M 1997 Optical process for liftoff of group III-nitride films Phys. Status Solidi a 159 R3-4
9. Wong W S, Sands T, Kneissl M, Bour D P, Mei P, Romano T and Johnson N M 2000 InxGa1-xN light emitting diodes on Si substrates fabricated by Pd-In metal bonding and laser lift-off Appl. Phys. Lett. 77 2822-4
10. Poher V et al 2008 Micro-LED arrays: a tool for two-dimensional neuron stimulation J. Phys. D: Appl. Phys. 41 094014 (Pubitemid 351591067)
11. Park S-I et al 2009 Printed assemblies of inorganic light-emitting diodes for deformable and semitransparent displays Science 325 977-81
12. Kim T-I et al 2013 Injectable, cellular-scale optoelectronics with applications for wireless optogenetics Science 340 211-6
13. Heise G, Domke M, Konrad J, Pavic F, Schmidt M, Vogt H, Heiss A, Palm J and Huber H P 2011 Monolithical serial interconnects of large CIS solar cells with picosecond laser pulses Phys. Procedia 12 149-55
14. Moser R, Goßler C, Kunzer M, Köhler K, Pletschen W, Brunne J, Schwarz U T and Wagner J 2013 Laser direct writing of GaN-based light-emitting diodes - the suitable laser source for mesa definition J. Appl. Phys. 113 103107
15. Liao L-D, Chang Y-J, Lai H-Y, Lin C-T, Lin Z-M, Tsang S and Chen Y-Y 2012 A novel light-addressable multi-electrode array chip for neural signal recording based on VCSEL diode arrays J. Neurosci. Neuroeng. 1 4-12