Metal organic chemical vapor deposition and investigation of structural, optical and gas sensing characteristics of ZnO thin film grown on quartz

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8549, Issue , 2012, Pages

  Pati, S ^a   Banerji, P ^a   Majumder, S B ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY   (India)

Author keywords

Nano crystalline materials; Sensitivity and Porosity; Van der Drift model

Indexed keywords

CHEMICAL DETECTION; CHEMICAL SENSORS; METALLIC FILMS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; OPTICAL FILMS; QUARTZ; ULTRAVIOLET VISIBLE SPECTROSCOPY; VAPORS; X RAY DIFFRACTION; ZINC;

A3. METAL ORGANIC CHEMICAL VAPOR DEPOSITION (MOCVD); DRIFT MODEL; GAS CONCENTRATION; GAS SENSING CHARACTERISTICS; OXYGEN PRECURSORS; QUARTZ SUBSTRATE; SENSOR APPLICATIONS; UV VISIBLE SPECTROSCOPY;

GAS DETECTORS;

EID: 84899994334     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.927024     Document Type: Conference Paper

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