High sensitivity electret accelerometer with integrated FET

IEEE Sensors Journal

Volumn 14, Issue 6, 2014, Pages 1770-1777

  Hillenbrand, Joachim ^a   Motz, Tilman ^a   Sessler, Gerhard M ^a  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Accelerometer; cellular polymer; electret; electret transducer; ferroelectret; fluoropolymer; piezoelectret

Indexed keywords

ELECTRETS; ELECTRODES; FIELD EFFECT TRANSISTORS; SEISMOLOGY; VOLTAGE REGULATORS;

CELLULAR POLYMER; FERROELECTRET; FLAT FREQUENCY RESPONSE; FLUOROPOLYMER; HIGH SENSITIVITY; INERTIAL FORCES; MEASURED RESULTS; PIEZOELECTRET;

ACCELEROMETERS;

EID: 84899584984     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2014.2302300     Document Type: Article

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