FB2B laser ablation of UV transparent polymer material

Journal of Laser Micro Nanoengineering

Volumn 1, Issue 1, 2006, Pages 28-32

  Obata, Kotaro ^a   Sugioka, Koji ^a   Midorikawa, Katsumi ^a  

^a INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

Author keywords

Ablation; CYTOP; FB2B laser; Micromachine; Polymer; VUV

Indexed keywords

EID: 84899503186     PISSN: None     EISSN: 18800688     Source Type: Journal    
DOI: 10.2961/jlmn.2006.01.0006     Document Type: Article

References (17)

1. http://www.agc.co.jp/english/chemicals/shinsei/cytop/cy top.htm
2. C. Anolick, J. A. Hrivnak, and R. C. Wheland, Adv. Mat. 10, 1211 (1998)
3. Y. G. Zhao, W. K. Lu, Y. Ma, S. S. Kim, S. T. Ho, and T. J. Marks, Appl. Phys. Lett., 77, 2961 (2000)
4. A. M. Wu and A. Knoesen, J. Polym. Sci. & Polym. Phys. 39, 2717 (2001)
5. H. Y. Liu, G. D. Peng., P. L. Chu, Y. Koike, and Y. Watanabe, Electron. Lett., 37, 347 (2001)
6. H. Y. Liu, G. D. Peng, and P. L. Chu, Opt. Commun. 204, 151 (2002)
7. F. Mederer, R. Jager, P. Schnitzer, H. Unold, M. Kicherer, K. J. Ebeling, M. Naritomi, and R. Yoshida, Proc. SPIE 3896, 273 (1999)
8. M. B. Tayahi, M. El-Aasser, and N. K. Dutta, Proc. SPIE 3939, 79 (2000)
9. G. D. Peng and P. L. Chu, Proc. SPIE 4110, 123 (2000)
10. J. Ballato, D. W. Smith Jr., S. H. Foulger, and E. Wagener, Proc. SPIE 4805, 1 (2002)
11. T. Shinohara, T. Adachi, K. Ikeda, T. Morishima, K. Hirota, H. M. Shimizu, T. Oku, and J. Suzuki, Nucl. Instr. and Meth. A 529, 134 (2004)
12. Y. Matsumoto, K. Yoshida, and M. Ishida, Sensors & Actuators A, 66, 308 (1998)
13. K. Maenaka, T. Nishimura, H. Ikeda, T. Fujita, and M. Maeda, IEEJ Trans. on Sensors and Micromachines, 120, 136 (2000)
14. S. Bhansali, A. Han, M. Patel, K. W. Oh, C. H. Ahn, and H. T. Henderson, Proc. SPIE 3877, 101 (1999)
15. N. Honda, S. Shoji, M. Isomura, Y. Ashihara, K. Akahori, and H. Sato, Digest of Papers. Microprocesses and Nanotechnology 2001(MNC2001), pp.24
16. C. S. Lee, S. H. Lee, S. S. Park, Y. K. Kim, and B. G. Kim, Biosensors Bioelectron., 18, 437 (2003)
17. R. H. French, R. C. Wheland, W. Qiu, M. F. Lemon, E. Zhang, J. Gordon, V. A. Petrov, V. F. Cherstkov, and N. I. Delaygina, J. Fluorine Chem., 122, 63 (2003)