Resolving chemical/bio-compatibility issues in microfluidic MEMS systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3877, Issue , 1999, Pages 101-109

  Bhansali, Shekhar ^a   Han, Arum ^a   Patel, Manoj ^a   Oh, Kwang W ^a   Ahn, Chong H ^a   Henderson, H Thurman ^a  

^a UNIVERSITY OF CINCINNATI   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; BONDING; FLUOROCARBONS; MICROELECTROMECHANICAL DEVICES; PLASTIC COATINGS; POLYTETRAFLUOROETHYLENES;

CHEMICAL COMPATIBILITY; MICROFLUIDIC SYSTEMS; MICRORESERVOIRS;

FLUIDIC DEVICES;

EID: 0033308676     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)