SCOPUS 정보 검색 플랫폼

Volumn 27, Issue , 2012, Pages 426-431

Al2O3/SiNx-stacks at increased temperatures: Avoiding blistering during contact firing

Author keywords

Blistering Stability; Deposition Temperature; Firing; Passivation

Indexed keywords

EID: 84897149355 PISSN: 18766102 EISSN: None Source Type: Conference Proceeding
DOI: 10.1016/j.egypro.2012.07.088 Document Type: Conference Paper

Times cited : (22)

References (9)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.