Growth of IGZO thin films and fabrication of transparent thin film transistor by RF magnetron sputtering

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8818, Issue , 2013, Pages

  Sanal, K C ^a   Majeesh, M ^a   Jayaraj, M K ^a  

^a Department of Physics   (India)

Author keywords

AFM; IGZO; rf magnetron sputtering; TFT

Indexed keywords

AFM; ENHANCEMENT MODES; FIELD-EFFECT MOBILITIES; IGZO; RF-MAGNETRON SPUTTERING; STRUCTURAL STUDIES; TFT; TRANSPARENT THIN FILM TRANSISTOR;

AMORPHOUS FILMS; CONDUCTIVE FILMS; ELECTRIC PROPERTIES; MAGNETRON SPUTTERING; REFRACTIVE INDEX; THIN FILMS; X RAY DIFFRACTION; ZINC;

THIN FILM TRANSISTORS;

EID: 84896879133     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.2023865     Document Type: Conference Paper

References (19)

1. K. L. Chopra, S. Major and D. K. Pandya, Thin Solid Films 102 (1983) 1.
2. A. L. Dawar and J. C. Joshi, J. Mater. Sci. 19 (1984) 1.
3. H. L. Hartnagel, A. L. Dawar, A. K. Jain and C. Jagadish, Semiconducting Transparent Thin Films, Institute of Physics Publishing, London, 1995.
4. D. S. Ginley and C. Bright, MRS Bull. 25 (2000) 15.
5. E. Fortunato, D. Ginley, H. Hosono and D. C. Paine, MRS Bull. 32 (2007) 242.
6. G. J. Exarhos and X. D. Zhou, Thin Solid Films 515 (2007) 7025.
7. K. Nomura, H. Ohta, A. Takagi, T. Kamiya, M. Hirano, and H. Hosono, Nature London (2004) 432, 488
8. K. Nomura, H. Ohta, K. Ueda,T. Kamiya, M. Hirano and H. Hosono Science 300 (2003) 1269.
9. M.Orita, M.Takeuchi, H.Sakai, and H.Tanji, Jpn.J.appl.Phys., vil. 34, no.11B,(1995) pp. L1550-2.
10. M.orita, H.Tanji, M.Mizuno, H. Adachi and I. Tanaka, Phys. Rev. B: Condens. Matter. vol. 61, no. 3 (2000) pp.1811-6.
11. K. Nomura, T. Kamiya, H. Ohta, T. Uruga, M. Hirano, and H. Hosono, Phys. Rev. B: Condens. Matter. vol. 75 (2007) pp. 035212.
12. M. Islam and M. Hakim, J. Mater. Sci. Lett., vol. 5, no. 1, (1986) pp. 63-65.
13. M. Nakamura, N. Kimizuka, and T. Mohri, vol. 93, no. 2, (1991) pp. 298-315.
14. T. Moriga, D. R. Kammler, and T. O. Mason, vol. 82, no. 10, (1999) pp. 2705-10
15. M. Orita, H. Ohta, H. Hosono, K. Morita, H. Tanji, and H. Kawazoe, Mat. Res. Soc. Symp., vol. 623, (2000) pp.291-96.
16. M. Orita, H. Ohta, M. Hirano, S. Narushima, and H. Hosono, Philos. Mag. B, vol. 81, no. 5, (2001) pp. 501-15.
17. I. Song, S. Kim, H. Yin, C. J. Kim, J. Park, S. Kim, H.S Choi, E. Lee and Y . Park, IEEE Electron Device Lett. 29 (2008) 549.
18. H. Yabuta, M. Sano, K. Abe, T. Aiba, T. Den, H. Kumomi, K. Nomura, T. Kamiya, and H. Hosono, Appl. Phys. Lett. 89,(2006) 112-123.
19. R. Swanepoel, J.Phys.E 16 (1983) 1214.