Design and realization of catalytic combustion-type gas sensor with sandwich dual bridge microstructure

Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument

Volumn 35, Issue 2, 2014, Pages 350-359

  Gu, Juntao ^a,b   Zhang, Yongde ^a   Jiang, Jingang ^a   Li, Shutong ^a  

^a HARBIN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^b Heilongjiang Province Electronic and Information Products Supervision Inspection Institute   (China)

Author keywords

Catalytic combustion; Dual bridge microstructure; Gas sensor; Sandwich structure

Indexed keywords

CATALYSIS; CATALYST SUPPORTS; CHEMICAL SENSORS; GAS DETECTORS; MANUFACTURE; MICROSTRUCTURE; PLATINUM; RESISTORS; SANDWICH STRUCTURES; SENSORS; SILICON; SILICON OXIDES;

ANSYS FINITE ELEMENTS; CATALYTIC COMBUSTION; ENERGY SPECTRUM METHOD; HIGH POWER CONSUMPTION; RESPONSE AND RECOVERY TIME; SENSITIVE MATERIALS; TEMPERATURE RANGE; THIN-FILM TECHNOLOGY;

BRIDGES;

EID: 84896529713     PISSN: 02543087     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (16)

1. HAN N, TIAN Y, WU X, et al. Improving humidity selectivity in formaldehyde gas sensing by a two-sensor array made of Ga-doped ZnO[J]. Sensors and Actuators B. 2009, 138: 228-235.
2. SOHN J H, ATZENI M, ZELLER L, et al. Characterisation of humidity dependence of a metal oxide semiconductor sensor array using partial least squares[J]. Sensors and Actuators B. 2008, 131: 230-235.
3. WANG CH L, ZHU ZH D. Fabrication and sensitivity test of multi-film gas sensor[J]. Chinese Journal of Scientific Instrument, 2009, 29(7): 1395-1399.
4. LV P. Study of formaldehyde sensor based on MWCNTs-QCM[J]. Chinese Journal of Scientific Instrument, 2011, 31(12): 2768-2773.
5. LI X, JIANG Y D, TAI H L, et al. The fabrication and the characteristics investigation of organic thin-film transistor gas sensors based on the copper phthalocyanine[J]. Journal of Electronic Measurement and Instrument, 2012, 26(12): 1074-1079.
6. MIHRICAN M, ARZUM E, AYFER C. Electrochemical behaviour of carbon paste electrodes enriched with tin oxide nanoparticles using voltammetry and electrochemical impedance spectroscopy[J]. Colloids and Surfaces B: Biointerfaces, 2011, 86(1): 154-157.
7. SHA CH ZH, SHI Y B, XIU D B, et al. Intelligent detection system for long-term stability of gas sensor[J]. Electronic Measurement Technology, 2010, 33(6): 102-105.
8. 2 gas sensor[J]. Sensors and Actuators, B: Chemical, 2013, 187: 340-346.
9. GUO H H, CHEN X D, DU G T, et al. Study on novel formaldehyde vapor sensor based on Si bridge[J]. Chinese Journal of Scientific Instrument, 2011, 32(1): 138-143.
10. MOON S E, CHO N J, LEE H K, et al. Semiconductor-type MEMS gas sensor for real-time environmental monitoring applications[J]. ETRI Journal, 2013, 35(4): 617-624.
11. TSANG K M, CHAN W L. Non-destructive stiffness detection of utility wooden poles using wireless MEMS sensor[J]. Measurement: Journal of the International Measurement Confederation, 2011, 44(6): 1021-1207.
12. REN X W, XU ZH ZH. Effect of catalytic carrier adulteration on catalytic sensorstability[J]. Transducer and Microsystem Technologies, 2009, 28(4): 30-33.
13. TARWAL N L, RAJGURE A V, PATIL J Y, et al. A selective ethanol gas sensor based on spray-derived Ag-ZnO thin films[J]. Journal of Materials Science, 2013, 48(20): 7274-7282.
14. SONG K, WANG Q, ZHANG ZH P. Design of a wireless electronic nose system based on single sensor temperature modulation[J]. Chinese Journal of Scientific Instrument, 2011, 32(1): 150-156.
15. 3 gas sensing array and least squares support vector regression[J]. Sensors, 2011, 11(1): 485-505.
16. CAO J N, ZHANG K K, WANG ZH. New scheme of methane concentration detection with tunable diode laser absorption spectroscopy[J]. Chinese Journal of Scientific Instrument, 2010, 31(11): 2597-2602.