A curled PZT cantilever based MEMS harvester

2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013

Volumn , Issue , 2013, Pages 162-165

  Park, Hyeonsu ^a   Park, Jongcheol ^a   Park, Jaeyeong ^a  

^a Kwangwoon University   (South Korea)

Author keywords

curled cantilever; energy harvester; piezoelectric; PZT; tow dimension vibration energy harvesting

Indexed keywords

BENDING (DEFORMATION); ELECTRODES; ENERGY HARVESTING; FERROELECTRICITY; NATURAL FREQUENCIES; PIEZOELECTRICITY; POLYIMIDES; SCANNING PROBE MICROSCOPY; SILICON NITRIDE;

CURLED CANTILEVER; ENERGY HARVESTER; PIEZOELECTRIC; PZT; VIBRATION ENERGY HARVESTING;

NANOCANTILEVERS;

EID: 84896342316     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISAF.2013.6748671     Document Type: Conference Paper

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