Nanoimprint of nanofluidic channels by using hydrophilic hydrogen silsesquioxane (HSQ)

Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference: 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences

Volumn 1, Issue , 2005, Pages 518-520

  Cheng, Li Jing ^a   Chang, Shao Ting ^a   Guo, L Jay ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

BioMEMS; Hydrogen silsesquioxane (HSQ); Nanofluidic channels; Nanoimprint

Indexed keywords

BIOMEMS; CHEMICAL ANALYSIS; HYDROPHILICITY; NANOFLUIDICS; NANOIMPRINT LITHOGRAPHY;

FLUIDIC CHANNELS; HYDROGEN SILSESQUIOXANE; NANO-IMPRINT; NANOFLUIDIC CHANNEL; NANOIMPRINT TECHNOLOGY; PROCESSING TIME; ROOM TEMPERATURE; SACRIFICIAL LAYER;

ELECTRON BEAM LITHOGRAPHY;

EID: 84896149024     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

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