Influence of sputtering conditions on the optical and electrical properties of laser-annealed and wet-etched room temperature sputtered ZnO:Al thin films

Thin Solid Films

Volumn 555, Issue , 2014, Pages 13-17

  Boukhicha, Rym ^a   Charpentier, Coralie ^a,b   Prod'Homme, Patricia ^b   I Cabarrocas, Pere Roca ^a   Lerat, Jean François ^c   Emeraud, Thierry ^c   Johnson, Erik ^a  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

^b TOTAL   (France)

^c PV Business Unit   (Belgium)

Author keywords

Chemical texturing; Laser annealing; Light scattering; Transparent conductive oxide

Indexed keywords

EID: 84894484811     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2013.08.014     Document Type: Article

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