Nanofabrication with laser holographic lithography for nanophotonic structures

Journal of Laser Micro Nanoengineering

Volumn 2, Issue 1, 2007, Pages 31-35

  Yeo, Jong Souk ^a   Lewis, Henry ^a   Meyer, Neal ^a  

^a HEWLETT PACKARD COMPANY   (United States)

Author keywords

Atomic layer deposition; Laser holographic lithography; Nanofabrication; Photonic crystal

Indexed keywords

EID: 84893665365     PISSN: None     EISSN: 18800688     Source Type: Journal    
DOI: 10.2961/jlmn.2007.01.0006     Document Type: Article

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