A MEMS-based rotational accelerometer for HDD applications with 2.5rad/sec2resolution and digital output

European Solid-State Circuits Conference

Volumn , Issue , 2001, Pages 321-324

  Gola, A ^a   Bagnalasta, N ^a   Bendiscioli, P ^a   Chiesa, E ^a   Delbo, S ^a   Lasalandra, E ^a   Pasolini, F ^a   Tronconi, M ^a   Ungaretti, T ^a   Baschirotto, A ^b  

^a STMICROELECTRONICS   (Italy)

^b UNIVERSITY OF SALENTO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

BIT STREAM; DIGITAL INTERFACES; DIGITAL OUTPUT; EXTERNAL DISTURBANCES; FEED-FORWARD COMPENSATION; MEMS SENSORS; ROTATIONAL ACCELERATION; TRACK DENSITY;

CAPACITIVE SENSORS;

ACCELEROMETERS;

EID: 84893652389     PISSN: 19308833     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

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