Micromachined fully differential lateral accelerometer

Proceedings of the Custom Integrated Circuits Conference

Volumn , Issue , 1996, Pages 315-318

  Lemkin, Mark ^a   Boser, Bernhard E ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANALOG TO DIGITAL CONVERSION; BIPOLAR INTEGRATED CIRCUITS; CMOS INTEGRATED CIRCUITS; MEASUREMENT ERRORS; MICROMACHINING; POSITION MEASUREMENT; SIGNAL NOISE MEASUREMENT;

DIFFERENTIAL CAPACITIVE INTERFACE; MICROMACHINED LATERAL ACCELEROMETER; ON CHIP ELECTRONICS; SENSING ELEMENT; SWITCH CHARGE INJECTION;

ACCELEROMETERS;

EID: 0029723495     PISSN: 08865930     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)