A hybrid silicon-PDMS optofluidic platform for sensing applications

Biomedical Optics Express

Volumn 5, Issue 2, 2014, Pages 417-426

  Testa, Genni ^a   Persichetti, Gianluca ^a   Sarro, Pasqualina M ^b   Bernini, Romeo ^a  

^a INSTITUTE FOR ELECTROMAGNETIC SENSING OF THE ENVIRONMENT   (Italy)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; LITHOGRAPHY; MICROCHANNELS; MICROFLUIDICS;

FABRICATION PROCESS; FLUORESCENCE MEASUREMENTS; LAB-ON-A-CHIP APPLICATIONS; LIQUID CORE WAVEGUIDE; MICRO-FLUIDIC DEVICES; SENSING APPLICATIONS; SILICON TECHNOLOGIES; THREE-DIMENSIONAL DEVICES;

SILICON;

SILICON; SILICON POLY DIMETHYSILOXANE; UNCLASSIFIED DRUG;

ARTICLE; BIOSENSOR; BIOTECHNOLOGICAL PROCEDURES; CHROMOPHORE ASSISTED LIGHT INACTIVATION; DIFFUSION; FABRICATION; FLUORESCENCE; LIMIT OF DETECTION; MICROCHIP ANALYSIS; REFRACTION INDEX; SENSITIVITY AND SPECIFICITY; SPECTROSCOPY;

EID: 84893538232     PISSN: None     EISSN: 21567085     Source Type: Journal    
DOI: 10.1364/BOE.5.000417     Document Type: Article

References (36)

1. B. Kuswandi, Nuriman, J. Huskens, and W. Verboom, "Optical sensing systems for microfluidic devices: a review, " Anal. Chim. Acta 601(2), 141-155 (2007).
2. K. B. Mogensen and J. P. Kutter, "Optical detection in microfluidic systems, " Electrophoresis 30(S1 Suppl 1), S92-S100 (2009).
3. F. B. Myers and L. P. Lee, "Innovations in optical microfluidic technologies for point-of-care diagnostics, " Lab Chip 8(12), 2015-2031 (2008).
4. A. Schaap, Y. Bellouard, and T. Rohrlack, "Optofluidic lab-on-a-chip for rapid algae population screening, " Biomed. Opt. Express 2(3), 658-664 (2011).
5. L. Zhu, C. S. Lee, and D. L. DeVoe, "Integrated microfluidic UV absorbance detector with attomol-level sensitivity for BSA, " Lab Chip 6(1), 115-120 (2006).
6. B. R. Watts, Z. Zhang, C.-Q. Xu, X. Cao, and M. Lin, "Integration of optical components on-chip for scattering and fluorescence detection in an optofluidic device, " Biomed. Opt. Express 3(11), 2784-2793 (2012).
7. K. S. Lee, H. L. T. Lee, and R. J. Ram, "Polymer waveguide backplanes for optical sensor interfaces in microfluidics, " Lab Chip 7(11), 1539-1545 (2007).
8. Y. Zhao, K. D. Leake, P. Measor, M. H. Jenkins, J. Keeley, H. Schmidt, and A. R. Hawkins, "Optimization of interface transmission between integrated solid core and optofluidic waveguides, " IEEE Photon. Technol. Lett. 24, 46-48 (2012).
9. O. Hofmann, X. Wang, A. Cornwell, S. Beecher, A. Raja, D. D. C. Bradley, A. J. Demello, and J. C. Demello, "Monolithically integrated dye-doped PDMS long-pass filters for disposable on-chip fluorescence detection, " Lab Chip 6(8), 981-987 (2006).
10. M. Fleger and A. Neyer, "PDMS microfluidic chip with integrated waveguides for optical detection, " Microelectron. Eng. 83(4-9), 1291-1293 (2006).
11. K. B. Mogensen, J. El-Ali, A. Wolff, and J. P. Kutter, "Integration of polymer waveguides for optical detection in microfabricated chemical analysis systems, " Appl. Opt. 42(19), 4072-4079 (2003).
12. C. Dongre, J. van Weerd, N. Bellini, R. Osellame, G. Cerullo, R. van Weeghel, H. J. W. M. Hoekstra, and M. Pollnau, "Dual-point dual-wavelength fluorescence monitoring of DNA separation in a lab on a chip, " Biomed. Opt. Express 1(2), 729-735 (2010).
13. R. M. Vazquez, R. Osellame, D. Nolli, C. Dongre, H. van den Vlekkert, R. Ramponi, M. Pollnau, and G. Cerullo, "Integration of femtosecond laser written optical waveguides in a lab-on-chip, " Lab Chip 9(1), 91-96 (2009).
14. D. Yin, J. P. Barber, A. R. Hawkins, and H. Schmidt, "Highly efficient fluorescence detection in picoliter volume liquid-core waveguides, " Appl. Phys. Lett. 87(21), 211111 (2005).
15. G. Persichetti, G. Testa, and R. Bernini, "Optofluidic jet waveguide for laser-induced fluorescence spectroscopy, " Opt. Lett. 37(24), 5115-5117 (2012).
16. H. Schmidt and A. R. Hawkins, "Optofluidic waveguides: I. Concepts and implementations, " Microfluid Nanofluidics 4(1-2), 3-16 (2008).
17. D. Yin, E. J. Lunt, M. I. Rudenko, D. W. Deamer, A. R. Hawkins, and H. Schmidt, "Planar optofluidic chip for single particle detection, manipulation, and analysis, " Lab Chip 7(9), 1171-1175 (2007).
18. P. Friis, K. Hoppe, O. Leistiko, K. B. Mogensen, J. Hübner, and J. P. Kutter, "Monolithic integration of microfluidic channels and optical waveguides in silica on silicon, " Appl. Opt. 40(34), 6246-6251 (2001).
19. H. Andersson and A. van den Berg, "Microfluidic devices for cellomics: a review, " Sens. Actuators B Chem. 92(3), 315-325 (2003).
20. L. Zhu, C. S. Lee, and D. L. DeVoe, "Integrated microfluidic UV absorbance detector with attomol-level sensitivity for BSA, " Lab Chip 6(1), 115-120 (2006).
21. A. Nitkowski, A. Baeumner, and M. Lipson, "On-chip spectrophotometry for bioanalysis using microring resonators, " Biomed. Opt. Express 2(2), 271-277 (2011).
22. K. Kalkandjiev, L. Riegger, D. Kosse, M. Welsche, L. Gutzweiler, R. Zengerle, and P. Koltay, "Microfluidics in silicon/polymer technology as a cost-efficient alternative to silicon/glass, " J. Micromech. Microeng. 21(2), 025008 (2011).
23. K. Kalkandjiev, R. Zengerle, and P. Koltay, "Hybrid fabrication of microfluidic chips based on COC, silicon and TMMF dry resist, " in Proceedings of IEEE Conference on Micro Electro Mechanical Systems (MEMS) (IEEE, 2010), pp. 400-403.
24. J. M. K. Ng, I. Gitlin, A. D. Stroock, and G. M. Whitesides, "Components for integrated poly(dimethylsiloxane) microfluidic systems, " Electrophoresis 23(20), 3461-3473 (2002).
25. G. Testa, Y. Huang, L. Zeni, P. M. Sarro, and R. Bernini, "Hybrid Silicon-PDMS optofluidic ARROW waveguide, " IEEE Photon. Technol. Lett. 24(15), 1307-1309 (2012).
26. J. W. Parks, H. Cai, L. Zempoaltecatl, T. D. Yuzvinsky, K. Leake, A. R. Hawkins, and H. Schmidt, "Hybrid optofluidic integration, " Lab Chip, Advanced (2013).
27. G. Testa, Y. Huang, L. Zeni, P. M. Sarro, and R. Bernini, "Liquid core ARROW waveguides by atomic layer deposition, " IEEE Photon. Technol. Lett. 22(9), 616-618 (2010).
28. G. Testa, Y. Huang, P. M. Sarro, L. Zeni, and R. Bernini, "Integrated silicon optofluidic ring resonator, " Appl. Phys. Lett. 97(13), 131110 (2010).
29. G. Testa, Y. Huang, P. M. Sarro, L. Zeni, and R. Bernini, "High-visibility optofluidic Mach-Zehnder interferometer, " Opt. Lett. 35(10), 1584-1586 (2010).
30. R. Bernini, S. Campopiano, L. Zeni, and P. M. Sarro, "ARROW optical waveguides based sensors, " Sens. Actuators B Chem. 100(1-2), 143-146 (2004).
31. T. M. Squires and S. R. Quake, "Microfluidics: Fluid physics at the nanoliter scale, " Rev. Mod. Phys. 77(3), 977-1026 (2005).
32. J. Wang, M. Zheng, W. Wang, and Z. Li, "Optimal protocol for moulding PDMS with a PDMS master, " Chips & Tips (Lab on a Chip), 06 Jul 2010.
33. A. Pais, A. Banerjee, D. Klotzkin, and I. Papautsky, "High-sensitivity, disposable lab-on-a-chip with thin-film organic electronics for fluorescence detection, " Lab Chip 8(5), 794-800 (2008).
34. F. B. Myers and L. P. Lee, "Innovations in optical microfluidic technologies for point-of-care diagnostics, " Lab Chip 8(12), 2015-2031 (2008).
35. K. Miyaki, Y. Guo, T. Shimosaka, T. Nakagama, H. Nakajima, and K. Uchiyama, "Fabrication of an integrated PDMS microchip incorporating an LED-induced fluorescence device, " Anal. Bioanal. Chem. 382(3), 810-816 (2005).
36. R. Irawan, C. M. Tay, S. C. Tjin, and C. Y. Fu, "Compact fluorescence detection using in-fiber microchannels-its potential for lab-on-a-chip applications, " Lab Chip 6(8), 1095-1098 (2006).