Hybrid fabrication of microfluidic chips based on COC, silicon and TMMF dry resist

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 400-403

  Kalkandjiev, Kiril ^a   Zengerle, Roland ^a   Koltay, Peter ^a,b  

^a UNIVERSITY OF FREIBURG   (Germany)

^b BIOFLUIDIX GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIC BONDING; CHARACTERIZATION STUDIES; CYCLIC OLEFIN COPOLYMERS; DIFFERENT PROCESS; HYBRID FABRICATION; HYBRID TECHNOLOGY; INTERMEDIATE SILICON LAYERS; MANUFACTURING COST; MATERIAL SELECTION; MICROFLUIDIC CHIP; PLASTIC MICROFLUIDIC CHIPS; SILICON MICROCHANNELS; SILICON PROCESSING;

FLUIDIC DEVICES; MECHANICAL ENGINEERING; MECHANICS; OLEFINS; REACTIVE ION ETCHING;

MICROFLUIDICS;

EID: 77952767749     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2010.5442480     Document Type: Conference Paper

References (13)

1. O. Gutmann, R. Kuehlewein, S. Reinbold, R. Niekrawietz, C. P. Steinert, B. de Heij, R. Zengerle, M. Daub: "A highly parallel nanoliter dispenser for microarray fabrication"; Biomed. Microdevices; vol. 6, pp. 131-137; 2004.
2. C. K. Fredrickson, Z. H. Fan: "Macro-to-micro interfaces for microfluidic devices"; Lab Chip; vol. 4, pp. 526-533; 2004.
3. D. C. Duffy, J. C. McDonald, O. J. A. Schueller, G. M. Whitesides: "Rapid prototyping of microfluidic systems in poly(dimethylsiloxane)"; Anal. Chem.; vol. 70, pp. 4974-4984; 1998.
4. P. Abgrall, V. Conedera, H. Camon, A. M. Gue, N. T. Nguyen: "SU-8 as a structuralmaterial for labs-on-chips and microelectromechanical systems"; Electrophoresis; pp. 4539-4551; 2007.
5. H. Becker, C. Gartner: "Polymer microfabrication technologies for microfluidic systems"; Anal Bioanal Chem; vol. 390, pp. 89-111; 2007.
6. P. Abgrall, A. M. Gue: "Lab-on-chip technologies: making a microfluidic network and coupling it into a complete microsystem - a review"; J. Micromech. Microeng.; vol. 17, pp. R15-R49; 2007.
7. C. W. Tsao, D. L. Devoe: "Bonding of thermoplastic polymer microfluidics"; Microfluid. Nanofluid.; vol. 6, pp. 1-16; 2009.
8. K. Wulff: "Hybride Drucksensoren aus Kunststoff und Glas nach dem AMANDA-Verfahren"; 2001.
9. Y. C. Su, L. W. Lin: "Localized bonding processes for assembly and packaging of polymeric MEMS"; Ieee Transactions on Advanced Packaging; vol. 28, pp. 635-642; 2005.
10. S. Bhattacharya, A. Datta, J. M. Berg, S. Gangopadhyay: "Studies on surface wettability of poly(dimethyl) siloxane (PDMS) and glass under oxygen-plasma treatment and correlation with bond strength"; J. Microelectrochem. S.; vol. 14, pp. 590-597; 2005.
11. M P Larsson, R R A Syms, A G Wojcik, "Improved adhesion in hybrid Si-polymer MEMS via micromechanical interlocking"; J. Micromech. Microeng.; pp. 2074-2082; 2005.
12. M. Stubenrauch, M. Fischer, C. Kremin, M. Hoffmann, J. Mueller: "Bonding of silicon with filled and unfilled polymers"; Micro & Nano Letters; vol. 2, pp. 6-8; 2007.
13. BioFluidiX; http://www.biofluidix.com/uploads/media/TopSpot-E-Vision-02. pdf (November 15, 2009)