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Volumn 10, Issue 7, 1998, Pages 405-412
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Application of harmonic finite element analysis to a CMOS heat-capacity measurement structure
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Author keywords
Finite elements; Harmonic analysis; Heat capacity; Material characterization; Microsystem modeling
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Indexed keywords
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EID: 0041021966
PISSN: 09144935
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (5)
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References (6)
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