Electrodeposition of nanocrystalline copper thin films from 1-ethyl-3-methylimidazolium ethylsulphate ionic liquid

Journal of Applied Electrochemistry

Volumn 44, Issue 1, 2014, Pages 189-198

  Liu, Tomin ^a,b   Vilar, Rui ^a   Eugénio, Sónia ^a   Grondin, Joseph ^b   Danten, Yann ^b  

^a UNIVERSITY OF LISBON   (Portugal)

^b INSTITUT DES SCIENCES MOLÉCULAIRES   (France)

Author keywords

Copper; CuCl; Electrodeposition; Ionic liquid

Indexed keywords

CHLORINE COMPOUNDS; COPPER; COPPER DEPOSITS; COPPER METALLOGRAPHY; ELECTRODEPOSITION; ELECTRODES; ELECTROLYTES; ENERGY DISPERSIVE SPECTROSCOPY; IONIC LIQUIDS; MICROSTRUCTURE; NANOCRYSTALS; PARTICLE SIZE; PARTICLE SIZE ANALYSIS; SULFUR COMPOUNDS; THIN FILMS; X RAY POWDER DIFFRACTION;

CUCL; DEPOSITION CONDITIONS; DEPOSITION PARAMETERS; ENERGY DISPERSIVE X RAY SPECTROSCOPY; HOMOGENEOUS STRUCTURE; IONIC-LIQUID BASED ELECTROLYTES; NANOCRYSTALLINE COPPER; NANOCRYSTALLINE MICROSTRUCTURES;

COPPER COMPOUNDS;

EID: 84891862273     PISSN: 0021891X     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10800-013-0630-6     Document Type: Article

References (19)

1. Andricacos PC, Uzoh C, Dukovic JO, Horkans J, Deligianni H (1998) Damascene copper electroplating for chip interconnections. IBM J Res Dev 42(5):567-574
2. Wolf S (2002) Processing for the VLSI Era. 4: Deep-submicron process technology, vol 4. Lattice Press, Sunset Beach
3. Beica R, Sharbono C, Ritzdorf T, IEEE (2008) Through silicon via copper electrodeposition for 3D integration. In: Proceedings of 58th electronic components & technology conference. IEEE, Lake Buena Vista, pp 577-583
4. Endres F, Abbott A, MacFarlane D (2008) Electrodeposition from ionic liquids. Wiley VCH, Weinheim
5. Tomkiewicz M (2010) Environmental aspects of electrodeposition. In: Schlesinger M, Paunovic M (eds) Modern electroplating, 5th edn. Wiley, Hoboken, pp 555-574
6. Anastas P, Warner J (1998) Green chemistry: theory and practice. Oxford University Press, New York
7. Chen PY, Sun IW (1999) Electrochemical study of copper in a basic 1-ethyl-3-methylimidazolium tetrafluoroborate room temperature molten salt. Electrochim Acta 45(3):441-450. doi: 10.1016/s0013-4686(99)00275-3 (Pubitemid 30524328)
8. Murase K, Nitta K, Hirato T, Awakura Y (2001) Electrochemical behaviour of copper in trimethyl-n-hexylammonium bis((trifluoromethyl)sulfonyl)amide, an ammonium imide-type room temperature molten salt. J Appl Electrochem 31(10):1089-1094. doi: 10.1023/a:1012255601793 (Pubitemid 33025553)
9. El Abedin SZ, Saad AY, Farag HK, Borisenko N, Liu QX, Endres F (2007) Electrodeposition of selenium, indium and copper in an air- and water-stable ionic liquid at variable temperatures. Electrochim Acta 52(8):2746-2754. doi: 10.1016/j.electacta.2006.08.064 (Pubitemid 46161476)
10. Leong TI, Sun IW, Deng MJ, Wu CM, Chen PY (2008) Electrochemical study of copper in the 1-ethyl-3-methylimidazolium dicyanamide room temperature ionic liquid. J Electrochem Soc 155(4):F55-F60. doi: 10.1149/1.2840627 (Pubitemid 351357511)
11. Brooks NR, Schaltin S, Van Hecke K, Van Meervelt L, Binnemans K, Fransaer J (2011) Copper(I)-containing ionic liquids for high-rate electrodeposition. Chem-A Eur J 17(18):5054-5059. doi: 10.1002/chem.201003209
12. Abbott AP, El Ttaib K, Frisch G, McKenzie KJ, Ryder KS (2009) Electrodeposition of copper composites from deep eutectic solvents based on choline chloride. Phys Chem Chem Phys 11(21):4269-4277. doi: 10.1039/b817881j
13. Fernandez A, Garcia J, Torrecilla JS, Oliet M, Rodriguez F (2008) Volumetric, transport and surface properties of bmim MeSO4 and emim EtSO4 ionic liquids as a function of temperature. J Chem Eng Data 53(7):1518-1522. doi: 10.1021/je8000766
14. Froba AP, Kremer H, Leipertz A (2008) Density, refractive index, interfacial tension, and viscosity of ionic liquids EMIM EtSO4, EMIM NTf2, EMIM N(CN)(2), and OMA NTf2 in dependence on temperature at atmospheric pressure. J Phys Chem B 112(39):12420-12430. doi: 10.1021/jp804319a
15. Cullity B (1956) Elements of X-ray diffraction. Addison-Wesley Publishing Company, Inc, Reading
16. Holbrey JD, Reichert WM, Swatloski RP, Broker GA, Pitner WR, Seddon KR, Rogers RD (2002) Efficient, halide free synthesis of new, low cost ionic liquids: 1,3-dialkylimidazolium salts containing methyl- and ethyl-sulfate anions. Green Chem 4(5):407-413. doi: 10.1039/b204469b
17. Yang JZ, Wang B, Zhang QG, Tong J (2007) Study on solid-liquid phase equilibria in ionic liquid-1. The solubility of alkali chloride (MCl) in ionic liquid EMISE. Fluid Phase Equilib 251(1):68-70. doi: 10.1016/j.fluid.2006.10.018 (Pubitemid 44908815)
18. Greef R, Peat R, Peter L, Pletcher D, Robinson J (1990) Instrumental methods in electrochemistry. Elis Horwood Limited, Chichester
19. Brett C, Brett A (2005) Electrochemistry principles, methods and applications. Oxford University Press, New York