SCOPUS 정보 검색 플랫폼

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 32, Issue 1, 2014, Pages

Adhesion testing of atomic layer deposited TiO2 on glass substrate by the use of embedded SiO2 microspheres

(4) Lyytinen, Jussi a Berdova, Maria a Franssila, Sami a Koskinen, Jari a

a AALTO UNIVERSITY (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION TESTING; ATOMIC LAYER DEPOSITED; CRITICAL STRESS; ENERGY DISPERSIVE X RAY SPECTROSCOPY; GLASS SUBSTRATES; IMAGE ANALYSIS SOFTWARE; MECHANICAL ADHESION; MECHANICAL PARAMETERS;

ATOMIC LAYER DEPOSITION; COATINGS; GLASS; MICROSPHERES; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; THIN FILMS; TITANIUM DIOXIDE; X RAY SPECTROSCOPY;

ADHESION;

EID: 84891782240 PISSN: 07342101 EISSN: 15208559 Source Type: Journal
DOI: 10.1116/1.4827197 Document Type: Article

Times cited : (7)

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