Micro Pirani pressure sensor fabricated by inkjet printing of silver nanoparticles

2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Volumn , Issue , 2013, Pages 1783-1786

  Sette, D ^a   Mercier, D ^a   Brunet Manquat, P ^a   Poulain, C ^a   Blayo, A ^b  

^a CEA GRENOBLE   (France)

^b INP Grenoble EFPG   (France)

Author keywords

Flexible substrate; Inkjet printing; Micro Pirani gauge; Silver nanoparticles

Indexed keywords

FABRICATION PROCESS; FLEXIBLE POLYIMIDE SUBSTRATE; FLEXIBLE SUBSTRATE; INK-JET PRINTING TECHNOLOGIES; MICRO-PIRANI GAUGE; PHYSICAL SENSORS; SENSITIVITY RANGE; SILVER NANOPARTICLES;

ACTUATORS; FABRICATION; INK JET PRINTING; MICROSYSTEMS; NANOPARTICLES; PRESSURE SENSORS; SOLID-STATE SENSORS; SUBSTRATES; VACUUM GAGES;

SILVER;

EID: 84891719313     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/Transducers.2013.6627134     Document Type: Conference Paper

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