Pirani pressure sensor with distributed temperature sensing

ASME International Mechanical Engineering Congress and Exposition, Proceedings

Volumn 2, Issue , 2001, Pages 2689-2696

  Van Baar, J J ^a   Wiegerink, R J ^b   Lammerink, T S J ^b   Krijnen, G J M ^b   Elwenspoek, M ^b  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

DIFFERENTIAL EQUATIONS; ELECTRIC RESISTANCE; HEAT LOSSES; HEAT SINKS; HEATING; PRESSURE EFFECTS; TEMPERATURE DISTRIBUTION; THERMAL CONDUCTIVITY;

MICROBEAMS; PRESSURE SENSORS;

SENSORS;

EID: 1542726183     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)

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