Monolithic 2GHz electrostatically actuated MEMS oscillator with opto-mechanical frequency multiplier

2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Volumn , Issue , 2013, Pages 1472-1475

  Tallur, Siddharth ^a   Bhave, Sunil A ^a  

^a Department of Obstetrics Gynecology   (United States)

Author keywords

ALD; Displacement amplification; Opto acoustic oscillator; Partial air gap transduction; Phase noise

Indexed keywords

AIR-GAPS; ALD; CAPACITIVE TRANSDUCTIONS; DISPLACEMENT AMPLIFICATION; FREQUENCY MULTIPLIER; OPTO-ACOUSTIC; OSCILLATION SIGNALS; TRANSDUCTION EFFICIENCY;

ACOUSTIC NOISE; ACTUATORS; AMPLIFICATION; BACTERIOPHAGES; ELECTROSTATIC ACTUATORS; FREQUENCY MULTIPLYING CIRCUITS; MICROSYSTEMS; SOLID-STATE SENSORS;

PHASE NOISE;

EID: 84891691885     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/Transducers.2013.6627058     Document Type: Conference Paper

References (18)

1. J. P. Matas, J. F. Morris, and E. Guazzelli, "Inertial migration of rigid spherical particles in Poiseuille flow," Journal of Fluid Mechanics, vol. 515, pp. 171-195, 2004.
2. A. A. S. Bhagat, H. W. Hou, L. D. Li, C. T. Lim, and J. Han, "Pinched flow coupled shear-modulated inertial microfluidics for high-throughput rare blood cell separation," Lab on a Chip, vol. 11, pp. 1870-1878, 2010.
3. D. Di Carlo, "Inertial microfluidics," Lab on a Chip, vol. 9, pp. 3038-3046, 2009.
4. S. C. Hur, H. T. K. Tse, and D. Di Carlo, "Sheathless inertial cell ordering for extreme throughput flow cytometry," Lab on a Chip, vol. 10, pp. 274-280, 2010.
5. E. J. Lim, T. J. Ober, J. F. Edd, G. H. McKinley, and M. Toner, "Visualization of microscale particle focusing in diluted and whole blood using particle trajectory analysis," Lab on a chip, vol. 12, pp. 2199-2210, 2012.
6. J. Oakey, R. W. Applegate, E. Arellano, D. D. Carlo, S. W. Graves, and M. Toner, "Particle Focusing in Staged Inertial Microfluidic Devices for Flow Cytometry," Analytical Chemistry, vol. 82, pp. 3862-3867, 2010.
7. A. T. Ciftlik, M. Ettori, and M. A. M. Gijs, "High Throughput-Per-Footprint Inertial Focusing," Small, 2013, doi: 10.1002/smll.201201770
8. A. Bhagat, S. Kuntaegowdanahalli, and I. Papautsky, "Inertial microfluidics for continuous particle filtration and extraction," Microfluidics and Nanofluidics, vol. 7, pp. 217-226, 2009.
9. G. Segre and A. Silberberg, "Behaviour of macroscopic rigid spheres in Poiseuille flow Part 2. Experimental results and interpretation," Journal of Fluid Mechanics, vol. 14, pp. 136-157, 1962.
10. D. Di Carlo, D. Irimia, R. G. Tompkins, and M. Toner, "Continuous inertial focusing, ordering, and separation of particles in microchannels," Proceedings of the National Academy of Sciences, vol. 104, pp. 18892-18897, November 27, 2007 2007.
11. Y.-S. Choi, K.-W. Seo, and S.-J. Lee, "Lateral and cross-lateral focusing of spherical particles in a square microchannel," Lab on a chip, vol. 11, pp. 460-465, 2011.
12. M. A. Eddings, M. A. Johnson, and B. K. Gale, "Determining the optimal PDMS-PDMS bonding technique for microfluidic devices," Journal of Micromechanics and Microengineering, vol. 18, p. 067001, 2008.
13. E. Sollier, C. Murray, P. Maoddi, and D. Di Carlo, "Rapid prototyping polymers for microfluidic devices and high pressure injections," Lab on a chip, vol. 11, pp. 3752-3817, 2011.
14. B. Chun and A. J. C. Ladd, "Inertial migration of neutrally buoyant particles in a square duct: An investigation of multiple equilibrium positions," Physics of Fluids, vol. 18, p. 031704, 2006.
15. X. Shao, Z. Yu, and B. Sun, "Inertial migration of spherical particles in circular Poiseuille flow at moderately high Reynolds numbers," Physics of Fluids, vol. 20, p. 103307, 2008.
16. A. T. Ciftlik and M. A. M. Gijs, "A low-temperature parylene-to-silicon dioxide bonding technique for high-pressure microfluidics," Journal of Micromechanics and Microengineering, vol. 21, pp. 035011-035011, 2011.
17. A. T. Ciftlik and M. A. M. Gijs, "Parylene to silicon nitride bonding for post-integration of high pressure microfluidics to CMOS devices," Lab on a Chip, vol. 12, pp. 396-400, 2012.
18. A. T. Ciftlik and M. Gijs, "Low temperature pyrex/silicon wafer bonding via a single intermediate parylene layer," Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International, pp. 366-369, 2011.