Applications of FIB and dualbeam for nanofabrication

Scanning Microscopy for Nanotechnology: Techniques and Applications

Volumn , Issue , 2007, Pages 225-236

  Van Leer, Brandon ^a   Giannuzzi, Lucille A ^a   Anzalone, Paul ^a  

^a Thermo Fisher Scientific   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84891440980     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1007/978-0-387-39620-0_8     Document Type: Chapter

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