Comparison of heater architectures for thermal control of silicon photonic circuits

IEEE International Conference on Group IV Photonics GFP

Volumn , Issue , 2013, Pages 83-84

  Masood, Adil ^a   Pantouvaki, Marianna ^b   Lepage, Guy ^b   Verheyen, Peter ^b   Van Campenhout, Joris ^b   Absil, Philippe ^b   Van Thourhout, Dries ^a   Bogaerts, Wim ^a  

^a GHENT UNIVERSITY   (Belgium)

^b IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

DOPED SILICON; INTEGRATED HEATER; ORDERS OF MAGNITUDE; SILICON PHOTONICS; THERMAL CONTROL; THERMOOPTICS; TUNGSTEN METALLIZATION;

PHOTONIC DEVICES; SILICIDES;

PHOTONICS;

EID: 84891090209     PISSN: 19492081     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/Group4.2013.6644437     Document Type: Conference Paper

References (4)

1. P. Dong, W. Qian, H. Liang et al., "Thermally tunable silicon racetrack resonators with ultralow tuning power," Opt. Express, vol. 18, no. 19, pp. 20 298-20 304, 2010.
2. J. Van Campenhout, W. M. J. Green, S. Assefa et al., "Integrated nisi waveguide heaters for cmos-compatible silicon thermooptic devices," Opt. Lett., vol. 35, no. 7, pp. 1013-1015, 2010.
3. A. Masood, M. Pantouvaki, D. Goossens et al., "Cmos-compatible tungsten heaters for silicon photonic waveguides," in Group IV Photonics 2012, aug. 2012, pp. 234 -236.
4. P. Verheyen, G. Lepage, J. Van Campenhout et al., "Co-integration of ge detectors and si modulators in an advanced si photonics platform," in SPIE Photonics Europe. International Society for Optics and Photonics, 2012, pp. 843 114-843 114.