Co-integration of Ge detectors and Si modulators in an advanced Si photonics platform

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8431, Issue , 2012, Pages

  Verheyen, Peter ^a   Lepage, Guy ^a   Van Campenhout, Joris ^a   Pantouvaki, Marianna ^a   Absil, Philippe ^a   De Heyn, Peter ^b   Bogaerts, Wim ^b   Dumon, Pieter ^b   Selvaraja, Shankar ^b  

^a IMEC   (Belgium)

^b GHENT UNIVERSITY   (Belgium)

Author keywords

Ge detector; Modulator; Si photonics platform

Indexed keywords

COINTEGRATION; GE DETECTORS; PASSIVE COMPONENTS; PROCESS FLOWS; SI PHOTONICS; TOOLSETS;

DETECTORS; GERMANIUM; PHOTONIC DEVICES; PHOTONIC INTEGRATION TECHNOLOGY; PHOTONICS; SILICON;

MODULATORS;

EID: 84861978087     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.921747     Document Type: Conference Paper

References (9)

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