Cost-effective CMOS-compatible grating couplers with backside metal mirror and 69% coupling efficiency

Optics Express

Volumn 20, Issue 26, 2012, Pages

  Zaoui, Wissem Sfar ^a   Rosa, María Félix ^a   Vogel, Wolfgang ^a   Berroth, Manfred ^a   Butschke, Jörg ^a   Letzkus, Florian ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

1550 NM; BACKSIDE METAL; CMOS COMPATIBLE; CMOS FABRICATION; COST-EFFECTIVE METHODS; COUPLING EFFICIENCY; GRATING COUPLERS; GRATING STRUCTURES; SILICON-ON-INSULATORS; SINGLE MODE WAVEGUIDES; TELECOMMUNICATION WAVELENGTHS; WAFER TO WAFER BONDING;

BANDWIDTH; COST EFFECTIVENESS; MIRRORS; OPTICAL FIBER FABRICATION; SILICON WAFERS; TELECOMMUNICATION SYSTEMS;

OPTICAL FIBER COUPLING;

EID: 84871184628     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.20.00B238     Document Type: Conference Paper

References (12)

1. D. Taillaert, P. Bienstman, and R. Baets, "Compact efficient broadband grating coupler for silicon-on-insulator waveguides," Opt. Lett. 29(23), 2749-2751 (2004).
2. D. Taillaert, H. Chong, P. I. Borel, L. H. Frandsen, R. M. De La Rue, and R. Baets, "A compact two-dimensional grating coupler used as a polarization splitter," IEEE Photon. Technol. Lett. 15(9), 1249-1251 (2003).
3. Z. Wang, Y. Tang, L. Wosinski, and S. He, "Experimental demonstration of a high efficiency polarization splitter based on a one-dimensional grating with a Bragg reflector underneath," IEEE Photon. Technol. Lett. 22(21), 1568-1570 (2010).
4. D. Taillaert, F. Van Laere, M. Ayre, W. Bogaets, D. Van Thourhout, P. Bienstman, and R. Baets, "Grating couplers for coupling between optical fibers and nanophotonic waveguides," Jpn. J. Appl. Phys. 45(8A), 6071-6077 (2006).
5. S. K. Selvaraja, D. Vermeulen, M. Schaekers, E. Sleeckx, W. Bogaerts, G. Roelkens, P. Dumon, D. Van Thourhout, and R. Baets, "Highly efficient grating coupler between optical fiber and silicon photonic circuit," in Conference on Lasers and Electro-Optics, Baltimore, Maryland, CTuC6 (2009).
6. F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Kraus, and R. Baets, "Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides," J. Lightwave Technol. 25(1), 151-156 (2007).
7. C. Kopp, E. Augendre, R. Orobtchouk, O. Lemonnier, and J. M. Fedeli, "Enhanced fiber grating coupler integrated by wafer-To-wafer bonding," J. Lightwave Technol. 29(12), 1847-1851 (2011).
8. D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, and G. Roelkens, "High-efficiency fiber-To-chip grating couplers realized using an advanced CMOS-compatible siliconon-insulator platform," Opt. Express 18(17), 18278-18283 (2010).
9. http://www.rsoftdesign.com/10. Patent pending.
10. http://www.soitec.com/
11. J. Butschke, A. Ehrmann, B. Höfflinger, M. Irmscher, R. Käsmaier, F. Letzkus, H. Löschner, J. Mathuni, C. Reuter, C. Schomburg, and R. Springer, "SOI wafer flow process for stencil mask fabrication," Micr. Eng. 46(1-4), 473-476 (1999).
12. http://www.cargille.com/