Visible wavelength silicon nitride focusing grating coupler with AlCu/TiN reflector

Optics Letters

Volumn 38, Issue 14, 2013, Pages 2521-2523

  Romero García, Sebastian ^a   Merget, Florian ^a   Zhong, Frank ^b   Finkelstein, Hod ^b   Witzens, Jeremy ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

^b ILLUMINA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM SIZE; CLADDING THICKNESS; COMPLEMENTARY METAL OXIDE SEMICONDUCTORS; COUPLING EFFICIENCY; DECAY LENGTH; FOCUSING GRATING COUPLERS; PILOT LINE; VISIBLE WAVELENGTHS;

EFFICIENCY; FOCUSING; SILICON NITRIDE;

REFLECTION;

EID: 84880541889     PISSN: 01469592     EISSN: 15394794     Source Type: Journal    
DOI: 10.1364/OL.38.002521     Document Type: Article

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