An interior-ridge silicon microring modulator

Journal of Lightwave Technology

Volumn 31, Issue 24, 2013, Pages 3907-3914

  Timurdogan, Erman ^a   Sorace Agaskar, Cheryl M ^a   Hosseini, Ehsan Shah ^a   Watts, Michael R ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Diodes; optical modulation; resonators; silicon

Indexed keywords

DEPLETION MODES; FREE SPECTRAL RANGE; HIGH BANDWIDTH; HIGH-SPEED OPERATION; LOW RESISTANCE; MICRORING MODULATOR; NON-RETURN-TO-ZERO DATUM; SINGLE MODE OPERATION;

DIODES; FREQUENCY RESPONSE; LIGHT MODULATION; RESONATORS; SILICON;

MODULATORS;

EID: 84890056781     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/JLT.2013.2278761     Document Type: Article

References (29)

1. G. E. Moore "Cramming more components onto integrated circuits", Proc. IEEE, vol. 86, no. 1, pp.82-85 1998
2. S. Borkar and A. A. Chien "The future of microprocessors", Commun. ACM, vol. 54, no. 5, pp.67-77 2011
3. J. Torrellas "Architectures for extreme-scale computing", Computer, vol. 42, no. 11, pp.28-35 2009
4. I. Young, E. Mohammed, J. Liao, A. Kern, S. Palermo, B. Block, M. Reshotko and P. Chang "Optical I/O technology for tera-scale computing", Proc. IEEE Int. Solid-State Circuits Conf., pp.468-469 2009
5. M. Asghari and A. V. Krishnamoorthy "Silicon photonics: Energy-efficient communication", Nature Photon, vol. 5, pp.268-270 2011
6. B. Jalali, M. Paniccia and G. Reed "Silicon photonics", IEEE Microw. Mag., vol. 7, no. 3, pp.56-68 2006
7. J. Orcutt, A. Khilo, C. Holzwarth, M. Popovic, H. Li, J. Sun, T. Bonifield, R. Hollingsworth, F. Kartner, H. Smith, V. Stojanovic and R. Ram "Nanophotonic integration in state-of-the-art CMOS foundries", Opt Exp., vol. 19, no. 3, pp.2335-2346 2011
8. W. A. Zortman, D. C. Trotter, A. L. Lentine, G. Robertson, A. Hsia and M. R. Watts "Monolithic and two-dimensional integration of silicon photonic microdisks with microelectronics", IEEE Photonics J., vol. 4, no. 1, pp.242-249 2012
9. G. T. Reed, G. Mashanovich, F. Y. Gardes and D. J. Thomson "Silicon optical modulators", Nature Photon., vol. 4, no. 8, pp.518-526 2010
10. A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nico-laescu and M. Paniccia "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor", Nature, vol. 427, pp.615-618 2004
11. M. R. Watts, W. A. Zortman, D. C. Trotter, R. W. Young and A. L. Lentine "Low-voltage, compact, depletion-mode, silicon Mach-Zehnder modulator", IEEE J. Sel. Top. Quantum Electron., vol. 16, no. 1, pp.159-164 2010
12. Q. Xu, B. Schmidt, S. Pradhan and M. Lipson "Micrometre-scale silicon electro-optic modulator", Nature, vol. 435, no. 7040, pp.325-327 2005
13. M. R. Watts, D. C. Trotter, R. W. Young and A. L. Lentine "Ultralow power silicon microdisk modulators and switches", Proc. IEEE 2008 Int. Meeting Group IV Photon., pp.4-6
14. G. Li, X. Zheng, H. Thacker, J. Yao, Y. Luo, I. Shubin, K. Raj, J. E. Cunningham and A. V. Krishnamoorthy "40Â Gb/s thermally tunable CMOS ring modulator", Proc. IEEE Int. Meeting Group IV Photon., pp.1-3 2012
15. J. C. Rosenberg, W. M. J. Green, S. Assefa, D. M. Gill, T. Barwicz, M. Yang, S. M. Shank and Y. A. Vlasov "A 25 Gbps silicon microring modulator based on an interleaved junction", Opt. Exp., vol. 20, no. 24, pp.26411-26423 2012
16. M. R. Watts, W. A. Zortman, D. C. Trotter, R. W. Young and A. L. Lentine "Vertical junction silicon microdisk modulators and switches", Opt Exp., vol. 19, no. 22, pp.21989-22003 2011
17. E. Timurdogan, C. M. Sorace-Agaskar, A. Biberman and M. R. Watts "Vertical junction silicon microdisk modulators at 25Â Gb/s", presented at the Optical Fiber Commun. Conf. Expo. National Fiber Optics. Eng. Conf., 2013
18. A. Biberman, E. Timurdogan, W. A. Zortman, D. C. Trotter and M. R. Watts "Adiabatic microring modulators", Opt. Exp., vol. 20, no. 28, pp.29223-29236 2012
19. J. M. Shainline, J. S. Orcutt, M. T. Wade, K. Nammari, B. Moss, M. Georgas, C. Sun, R. J. Ram, V. StojanoviÄ? and M. A. PopoviÄ? "Depletion-mode carrier-plasma optical modulator in zero-change advanced CMOS", Opt. Lett., vol. 38, no. 15, pp.2657-2659 2013
20. E. Timurdogan, C. M. Sorace-Agaskar and M. R. Watts "L-Shaped Resonant Microring (LRM) Modulator", presented at the IEEE Opt. Interconnects Conf., 2013
21. E. S. Hosseini, S. Yegnanarayanan, A. H. Atabaki, M. Soltani and A. Adibi "Systematic design and fabrication of high-Q single-mode pulley-coupled planar silicon nitride microdisk resonators at visible wavelengths", Opt. Exp., vol. 20, no. 24, pp.26411-26423 2012
22. M. R. Watts "Adiabatic microring resonators", Opt. Lett., vol. 35, no. 19, pp.3231-3233 2010
23. M. R. Watts, W. A. Zortman, D. C. Trotter, G. N. Nielson, D. L. Luck and R. W. Young "Adiabatic resonant microrings (ARMs) with directly integrated thermal microphotonics", Proc. Quantum Electron. Laser Sci. Conf., pp.1-2 2009
24. E. Timurdogan, E. S. Hosseini, G. Leake, D. D. Coolbaugh and M. R. Watts "L-Shaped resonant microring (LRM) filter with integrated thermal tuner", Proc. Quantum Electron. Laser Sci. Conf., 2013
25. R. A. Soref and B. R. Bennett "Electrooptical effects in silicon", IEEE J. Quantum Electron., vol. 23, no. 1, pp.123-129 1987
26. R. A. Soref and B. R. Bennett "Electrooptical effects in silicon", IEEE J. Quantum Electron., vol. 23, no. 1, pp.123-129 1987
27. D. H. Staelin, A. W. Morgenthaler and J. A. Kong Electromagnetic Waves, 1994 :Prentice-Hall
28. S. M. Sze and K. K. Ng Physics of Semiconductor Devices, 2007 :Wiley
29. M. Popovic "Complex-Frequency Leaky Mode Computations Using PML Boundary Layers for Dielectric Resonant Structures", Proc. Integrated Photon. Res., 2003