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Volumn 120, Issue PART A, 2014, Pages 396-401

Qualification of encapsulation materials for module-level-processing

Author keywords

Module level processing; PECVD process; Silicones; Substrate; Thin Si layers; Wafer hybrid Si technology

Indexed keywords

CELL INTERCONNECTION; CELL PROCESSING; EFFICIENT SURFACE; MODULE-LEVEL-PROCESSING; SI LAYER; THERMAL EXPOSURE; ULTRATHIN SILICON; UV IRRADIATION;

EID: 84888322267     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2013.06.012     Document Type: Article
Times cited : (17)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.