All inkjet-printed piezoelectric polymer actuators: Characterization and applications for micropumps in lab-on-a-chip systems

Organic Electronics

Volumn 14, Issue 12, 2013, Pages 3423-3429

  Pabst, Oliver ^a,b   Perelaer, Jolke ^a   Beckert, Erik ^b   Schubert, Ulrich S ^a   Eberhardt, Ramona ^b   Tünnermann, Andreas ^a,b  

^a FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

^b FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

Flexible electronics; Inkjet printing; Low temperature plasma sintering; P(VDF TrFE); Piezoelectric actuators; Silver nanoparticles

Indexed keywords

BENDING (FORMING); ELECTRODES; FLEXIBLE ELECTRONICS; FLUORINE COMPOUNDS; INK JET PRINTING; LAB-ON-A-CHIP; METAL NANOPARTICLES; MICROFLUIDICS; PIEZOELECTRICITY; PLASTIC BOTTLES; POLYMERS; PUMPS; SILVER NANOPARTICLES; SINTERING; SUBSTRATES; TEMPERATURE;

DIGITAL PRINTING TECHNOLOGIES; LOW TEMPERATURE PLASMAS; NANO-PARTICLE DISPERSIONS; POLYETHYLENE TEREPHTHALATES (PET); POLYVINYLIDENE FLUORIDES; PVDF-TRFE; SANDWICH-LIKE STRUCTURE; TEMPERATURE-SENSITIVE POLYMERS;

PIEZOELECTRIC ACTUATORS;

EID: 84888299867     PISSN: 15661199     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.orgel.2013.09.009     Document Type: Article

References (34)

1. M. Zirkl, A. Sawatdee, U. Helbig, M. Krause, G. Scheipl, E. Kraker, P.A. Ersman, D. Nilsson, D. Platt, P. Bodö, S. Bauer, G. Domann, and B. Stadlober An all-printed ferroelectric active matrix sensor network based on only five functional materials forming a touchless control interface Adv. Mater. 23 2011 1 6
2. L. Yang, A. Rida, R. Vyas, and M. Tentzeris RFID tag and RF structures on a paper substrate using ink (Pubitemid 350240026)
3. J. Shinar, and R. Shinar Organic light-emitting devices (OLEDs) and OLED-based chemical and biological sensors: an overview J. Phys. D: Appl. Phys. 41 2008 133001
4. A. Lange, M. Wegener, C. Boeffel, B. Fischer, A. Wedel, and D. Neher A new approach to the solvent system for inkjet-printed P3HT:PCBM solar cells and its use in devices with printed passive and active layers Sol. Energy Mater. Sol. Cells 94 2010 1816 1821
5. M. Singh, H.M. Haverinen, P. Dhagat, and G.E. Jabbour Inkjet printing-process and its applications Adv. Mater. 22 2010 673 685
6. M. Zirkl, A. Haase, A. Fian, H. Schön, C. Sommer, G. Jakopic, G. Leising, B. Stadlober, I. Graz, N. Gaar, R. Schwödiauer, S. Bauer-Gogonea, and S. Bauer Low-voltage organic thin-film transistors with high-k nanocomposite gate dielectrics for flexible electronics and optothermal sensors Adv. Mater. 19 2007 2241 2245 (Pubitemid 47409285)
7. J. Perelaer, and U.S. Schubert Novel approaches for low temperature sintering of inkjet-printed inorganic nanoparticles for roll-to-roll (R2R) applications J. Mater. Res. 28 2013 564 573
8. S.H. Ko, H. Pan, C.P. Grigoropoulos, C.K. Luscombe, J.M.J. Fréchet, and D. Poulikakos Air stable high resolution organic transistors by selective laser sintering of ink-jet printed metal nanoparticles Appl. Phys. Lett. 90 2007 141103
9. S. Wünscher, S. Stumpf, A. Teichler, O. Pabst, J. Perelaer, E. Beckert, and U.S. Schubert Localized atmospheric plasma sintering of inkjet printed silver nanoparticles J. Mater. Chem. 22 2012 24569 24576
10. M.L. Allen, M. Aronniemi, T. Mattila, A. Alastalo, K. Ojanperä, M. Suhonen, and H. Seppä Electrical sintering of nanoparticle structures Nanotechnology 19 2008 175201
11. J. Perelaer, R. Abbel, S. Wünscher, R. Jani, T. van Lammeren, and U.S. Schubert Roll-to-roll compatible sintering of inkjet printed features by photonic and microwave exposure: from non-conductive ink to 40 bulk silver conductivity in less than 15 s Adv. Mater. 24 2012 2620 2625
12. L. Gervais, N. de Rooij, and E. Delamarche Microfluidic chips for point-of-care immunodiagnostics Adv. Mater. 23 2011 H151 H176
13. H. Becker, and C. Gärtner Polymer microfabrication technologies for microfluidic systems Anal. Bioanal. Chem. 390 2008 89 111
14. D.J. Laser, and J.G. Santiago A review of micropumps J. Micromech. Microeng. 14 2004 R35 R64
15. F. Amirouche, Y. Zhou, and T. Johnson Current micropump technologies and their biomedical applications Microsyst. Technol. 15 2009 647 666
16. Y. Bar-Cohen, Electroactive polymer (EAP) actuators as artificial muscles: Reality, Potential, and Challenges, second ed., SPIE Press Monograph, 2004. DOI 10.1117/3.547465.
17. T.-B. Xu, and J. Su Development, characterization, and theoretical evaluation of electroactive polymer-based micropump diaphragm Sens. Actuators, A 121 2005 267 274 (Pubitemid 40940809)
18. S. Zhang, B. Neese, K. Ren, B. Chu, F. Xia, T. Xu, S. Tadigadapa, Q. Wang, Q.M. Zhang, and F. Bauer Relaxor ferroelectric polymers, thin film devices, and ink-jet microprinting for thin film device fabrication Ferroelectrics 342 2006 43 56
19. I. Reinhold, C.E. Hendriks, R. Eckardt, J.M. Kranenburg, J. Perelaer, R.R. Baumann, and U.S. Schubert Argon plasma sintering of inkjet printed silver tracks on polymer substrates J. Mater. Chem. 19 2009 3384 3388
20. F.M. Wolf, J. Perelaer, S. Stumpf, D. Bollen, F. Kriebel, and U.S. Schubert Rapid low-pressure plasma sintering of inkjet-printed silver nanoparticles for RFID antennas J. Mater. Res. 28 2013 1254 1261
21. D. Mao, M. Quevedo-Lopez, H. Stiegler, B. Gnade, and H. Alshareef Optimization of poly(vinylidene fluoride-trifluoroethylene) films as non-volatile memory for flexible electronics Org. Electron. 11 2010 925 932
22. C. Hsueh Thermal stresses in elastic multilayer systems Thin Solid Films 418 2002 182 188 (Pubitemid 35274900)
23. H. Wang, Q.M. Zhang, L.E. Cross, and A.O. Sykes Piezoelectric, dielectric, and elastic properties of poly(vinylidene fluoride/ trifluoroethylene) J. Appl. Phys. 74 1993 3394 3398
24. Goodfellow GmbH homepage, Material properties table, < www.goodfellow.com > (accessed 22.07.13).
25. T. Zhang, and Q.-M. Wang Performance evaluation of a valveless micropump driven by a ring-type piezoelectric actuator IEEE Trans. Ultrason. Ferroelectr. 53 2006 463 473
26. A. Olsson, Valve-less diffuser micropumps, Ph.D. thesis, Royal Institute of Technology Stockholm, 1998.
27. P. Woias Micropumps - past, progress and future prospects Sens. Actuators, B 105 2005 28 38 (Pubitemid 40181544)
28. G.-H. Feng, and E.-S. Kim Piezoelectrically actuated dome-shaped diaphragm micropump J. Microelectromech. Syst. 14 2005 192 199 (Pubitemid 40679609)
29. C. Zhang, D. Xing, and Y. Li Micropumps, microvalves, and micromixers within pcr microfluidic chips: advances and trends Biotechnol. Adv. 25 2007 483 514 (Pubitemid 47049789)
30. C.A. Heid, J. Stevens, K.J. Livak, and P.M. Williams Real time quantitative PCR Genome Res. 6 1996 986 994 (Pubitemid 26388091)
31. R. Søndergaard, M. Hösel, D. Angmo, T.T. Larsen-Olsen, and F.C. Krebs Roll-to-roll fabrication of polymer solar cells Mater. Today 15 2012 36 49
32. X.-Z. Chen, Q. Li, X. Chen, X. Guo, H.-X. Ge, Y. Liu, and Q.-D. Shen Nano-imprinted ferroelectric polymer nanodot arrays for high density data storage Adv. Funct. Mater. 23 2013 3124 3129
33. J. Park, D.J. Lee, S.J. Kim, and J.H. Oh Dynamic characteristics measurements of inkjet-printed thin films of nanosilver suspensions on a flexible plastic substrate J. Micromech. Microeng. 19 2009 095021
34. S.-W. Hahm, and D.-Y. Khang Crystallization and microstructure-dependent elastic moduli of ferroelectric P(VDF-TrFE) thin films Soft Matter 6 2010 5802 5806