Effect of working pressure on growth of Cu(In,Ga)Se2 thin film deposited by sputtering from a single quaternary target

Materials Letters

Volumn 116, Issue , 2014, Pages 75-78

  Kong, Hui ^a,b   He, Jun ^a   Huang, Ling ^a   Zhu, Liping ^a   Sun, Lin ^a   Yang, Pingxiong ^a   Chu, Junhao ^a  

^a EAST CHINA NORMAL UNIVERSITY   (China)

^b Shanghai Solar Energy Research Center Limited Company   (China)

Author keywords

CIGS; Solar energy materials; Sputtering; Thin films

Indexed keywords

CIGS; CRYSTALLINE QUALITY; ENERGY DISPERSIVE X-RAY; QUATERNARY TARGETS; RF-MAGNETRON SPUTTERING; SODA LIME GLASS SUBSTRATE; SOLAR ENERGY MATERIALS; TRANSMISSION SPECTRUMS;

COPPER; GRAIN SIZE AND SHAPE; MAGNETRON SPUTTERING; SOLAR ENERGY; SPUTTERING; SUBSTRATES; THIN FILMS; X RAY DIFFRACTION;

SEMICONDUCTING SELENIUM COMPOUNDS;

EID: 84888079608     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2013.10.112     Document Type: Article

References (11)

1. I Repins, MA Contreras, B Egaas, C DeHart, J Schart, and CL Perkins Prog Photovolt Res Appl 16 2008 235 239
2. MA Green, K Emery, Y Hishikawa, and W. Warta Prog Photovolt Res Appl 18 2010 346 352
3. K Matsunaga, T Komaru, Y Nakayama, T Kume, and Y. Suzuki Sol Energy Mater Sol Cells 93 2009 1134 1138
4. AM Gabor, JR Tuttle, DS Albin, MA Contreras, and R. Noufi Appl Phys Lett 65 1994 198 (00)
5. JH Shi, ZQ Li, DW Zhang, QQ Liu, Z Sun, and SM. Huang Prog Photovolt Res Appl 19 2011 160 164
6. X Li, W Liu, G Jiang, D Wang, and C. Zhu Mater Lett 70 2012 116 118
7. S Shirakawa, Y Kannnaka, H Hasegawa, T Kariya, and S. Isomura Jpn J Appl Phys 38 1999 4997 (02)
8. PY Lin, and YH. Fu Mater Lett 70 2012 65 67
9. J He, L Sun, K Zhang, W Wang, J Jiang, and Y Chen Appl Surf Sci 264 2013 133 138
10. P Sigmund Phys Rev 184 1969 383
11. AJ Zhou, D Mei, XG Kong, XH Xu, LD Feng, and XY Dai Thin Solid Films 520 2012 6068 6074