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Volumn 7, Issue 11, 2013, Pages 946-949
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Passivation of aluminium-n+ silicon contacts for solar cells by ultrathin Al2O3 and SiO2 dielectric layers
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Author keywords
Contact resistance; Metal insulator semiconductor structures; Silicon; Solar cells; Surface passivation
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Indexed keywords
ATOMIC LAYER DEPOSITED;
CONTACT RECOMBINATIONS;
CONTACT RESISTIVITIES;
HIGH EFFICIENCY SILICON SOLAR CELLS;
INSULATOR THICKNESS;
METAL INSULATOR SEMICONDUCTOR STRUCTURES;
METAL-INSULATOR-SEMICONDUCTORS;
SURFACE PASSIVATION;
ALUMINUM;
ATOMIC LAYER DEPOSITION;
CONTACT RESISTANCE;
DIELECTRIC MATERIALS;
DIFFUSION;
MIS DEVICES;
OPEN CIRCUIT VOLTAGE;
PASSIVATION;
SILICON;
SILICON SOLAR CELLS;
SOLAR CELLS;
SILICON OXIDES;
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EID: 84888015852
PISSN: 18626254
EISSN: 18626270
Source Type: Journal
DOI: 10.1002/pssr.201308115 Document Type: Article |
Times cited : (40)
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References (12)
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