Combined Infrared and Raman temperature measurements on device structures

2006 International Conference on Compound Semiconductor Manufacturing Technology

Volumn , Issue , 2006, Pages 179-182

  Sarua, A ^a   Ji, Hangfeng ^a   Kuball, M ^a   Uren, M J ^b   Martin, T ^b   Hilton, K P ^b   Balmer, R S ^b  

^a UNIVERSITY OF BRISTOL   (United Kingdom)

^b QINETIQ   (United Kingdom)

Author keywords

GaN; HFET; Infrared; Raman; Temperature; Thermography

Indexed keywords

ALGAN/GAN HFETS; GAN; HFET; RAMAN; RAMAN METHODS; RAMAN TEMPERATURE MEASUREMENTS; SPATIAL RESOLUTION; TEMPERATURE RISE;

GALLIUM NITRIDE; INFRARED RADIATION; RAMAN SPECTROSCOPY; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES; TEMPERATURE; THERMOGRAPHY (TEMPERATURE MEASUREMENT);

TEMPERATURE MEASUREMENT;

EID: 84887493698     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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